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	气体配比对硼掺杂碳纳米管生长特性的影响
	王志 ; 巴德纯 ; 蔺增 ; 曹培江 ; 刘飞 ; 梁吉 ; WANG Zhi ; BA De-chun ; LIN Zeng ; CAO Pei-jiang ; LIU Fei ; LIANG Ji
	2010-06-08 ; 2010-06-08
关键词	碳纳米管 硼掺杂 等离子体化学气相沉积技术 气体配比 Carbon nanotube Boron-doped ECR-CVD Gas composition TB383.1
其他题名	Effects of gas composition on the synthesis of boron-doped carbon nanotubes
中文摘要	采用电子回旋共振微波等离子体化学气相沉积技术(ECR-CVD),以Fe3O4纳米粒子为催化剂,CH4、B2H6和H2为气源,在多孔硅基底上制备出了掺硼碳纳米管。研究了不同B2H6/CH4气体配比对碳纳米管生长特性的影响。使用扫描电子显微镜(SEM)、透射电子显微镜(TEM)和X射线光电子谱(XPS)对样品的形貌、结构及组分进行表征。结果表明:B2H6对纳米管的生长具有较大影响。气源中含有少量的B2H6就会破坏纳米管的定向生长,使纳米管变得弯曲;随着气源中B2H6比例的增加,纳米管结构从中空结构转变为类竹节结构,多壁管外径由60nm~90nm增大至200nm~250nm,管壁由10nm~20nm增厚至70nm~100nm,表面变得粗糙,同时纳米管的生长速度降低;纳米管中的B/C原子比随着B2H6比例的增大而增大,当B2H6/CH4体积配比为2∶1时B/C原子比增至28∶72。; Boron-doped carbon nanotubes(CNTs) were synthesized on porous silicon by electron cyclotron resonance chemical vapor deposition from CH_4、B_2H_6 and H_2 were used as the source gases and Fe_3O_4 nanoparticles as the catalyst.The effects of gas composition on the growth characteristics of boron-doped CNTs were investigated.Scanning electron microscopy,transmission electron microscopy and X-ray photoelectron spectroscopy were used to evaluate the structure and composition.Results show that addition of B_2H_6 influences the growth characteristic of CNTs greatly,making CNTs bend.Increasing the amount of B_2H_6 leads to a structural change in the CNTs from straight tubular to bamboo-like.Outer diameter increases from 60-90 nm to 200-250 nm,tube wall thickness increases from 10-20 nm to 70-100 nm,and a rougher surface and a decreased growth rate is noted.An increase in the B/C ratio of the specimen was detected as the amount of B_2H_6 increased.The B/C(ratio) can be up to 28∶72 when the B_2H_6/CH_4 ratio is 2∶1.; 国家自然科学基金(10332020,90206028)~~
语种	中文 ; 中文
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/48208]
专题	清华大学
推荐引用方式 GB/T 7714	王志,巴德纯,蔺增,等. 气体配比对硼掺杂碳纳米管生长特性的影响[J],2010, 2010.
APA	王志.,巴德纯.,蔺增.,曹培江.,刘飞.,...&LIANG Ji.(2010).气体配比对硼掺杂碳纳米管生长特性的影响..
MLA	王志,et al."气体配比对硼掺杂碳纳米管生长特性的影响".(2010).

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