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	微型二维扫描镜的原理性实验研究
	张弛 ; 张高飞 ; 尤政 ; ZHANG Chi ; ZHANG Gaofei ; YOU Zheng
	2010-05-13 ; 2010-05-13
关键词	二维扫描镜 微型化 扫描频率 扫描范围 two-dimensional scanning mirror micromation scanning frequency scanning range TN247
其他题名	Experimental investigation on the principle of a twodimensional scanning micro-mirror
中文摘要	为满足激光扫描装置微型化的要求,设计了一种微型二维扫描镜,能够通过反射激光束实现二维扫描。对这种结构建立了理论模型,分析了2个方向上的扫描频率和最大扫描角;对微型二维扫描镜原理样机进行了实验研究。结果表明:2个一维扫描频率分别为170.1H z和378.8H z;同时施加这2种谐振频率的激励时,可实现该扫描镜的二维大角度偏转;2个方向上的最大扫描角随激励位移的增加而变大;在10μm驱动位移的激励下,该微型二维扫描镜可达到大于30°×20°的扫描范围。; A two-dimensional scanning micro-mirror was presented and the laser scanning was two-dimensionally achieved by reflection to meet the micromation requirement of a laser scanning device.A theoretical model of the structure was used to analyze the scanning frequencies and the maximum scanning angles of two degrees of freedom.The principle device was studied and the experiment shows that the two scanning frequencies are 170.1 Hz and 378.8 Hz,respectively.The micro-mirror scans two-dimensionally with large amplitudes when actuated at two scanning frequencies simultaneously.The scanning range increases with increasing actuator displacement.By the actuation of 10 μm displacement,the scanning range of the two-dimensional scanning micro-mirror is above 30°×20°.
语种	中文 ; 中文
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/31226]
专题	清华大学
推荐引用方式 GB/T 7714	张弛,张高飞,尤政,等. 微型二维扫描镜的原理性实验研究[J],2010, 2010.
APA	张弛,张高飞,尤政,ZHANG Chi,ZHANG Gaofei,&YOU Zheng.(2010).微型二维扫描镜的原理性实验研究..
MLA	张弛,et al."微型二维扫描镜的原理性实验研究".(2010).

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