| 流体组装制造的金属-碳纳米管-金属结构(英文) | |
| 谭苗苗 ; 叶雄英 ; 王晓浩 ; 周兆英 ; TAN Miao-miao ; YE Xiong-ying ; WANG Xiao-hao ; ZHOU Zhao-ying | |
| 2010-05-13 ; 2010-05-13 | |
| 关键词 | 碳纳米管 流体组装 接触 光刻图形化 carbon nanotubes(CNT) fluidic alignment contact photolitho-pattern TB383.1 |
| 其他题名 | Fabrication of Metal-CNT-Metal Structures by Fluidic Alignment |
| 中文摘要 | 基于碳纳米管的纳米器件制造中,金属-碳纳米管-金属结构是重要部分.通过流体组装多壁碳纳米管,并在其上沉积、光刻图形化金属制造了金属-碳纳米管-金属结构.对比不同流体组装条件下的排列效果发现,较大的样品台倾角和较高的气流速度可实现较好的碳纳米管组装.通过对碳纳米管与金属间的接触电阻进行估算和比较,金属包覆碳纳米管比碳纳米管沉积在金电极上的接触方式具有更小的接触电阻和接触电阻分散性,且碳纳米管与金电极接触状态比钛电极好.最终通过该方法制造出了接触良好的金属-碳纳米管-金属结构.; Metal-CNT-metal structures are important in nano device fabrication based on carbon nanotubes. In this work, metal-CNT-metal structures were fabricated by assembling MWNTs with fluidic alignment and depositing and photolitho- patterning metals on MWNTs. The alignment effects under different fluidic conditions were investigated. Better alignment of MWNTs was realized when larger obliquity of sample holder and higher speed of gas flow were applied. Comparing contact resistances between MWNTs and metals,it is found that gold(Au)is the better contact metal than titanium(Ti),metals on MWNTs have both lower contact resistances and smaller dispersivity than MWNTs deposited on Au electrodes. Finally, metal-CNT-metal structures with well contact were fabricated. |
| 语种 | 英语 ; 英语 |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/31073]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | 谭苗苗,叶雄英,王晓浩,等. 流体组装制造的金属-碳纳米管-金属结构(英文)[J],2010, 2010. |
| APA | 谭苗苗.,叶雄英.,王晓浩.,周兆英.,TAN Miao-miao.,...&ZHOU Zhao-ying.(2010).流体组装制造的金属-碳纳米管-金属结构(英文).. |
| MLA | 谭苗苗,et al."流体组装制造的金属-碳纳米管-金属结构(英文)".(2010). |
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