| “Ni-Zn铁氧体颗粒-光刻胶”覆盖的片上射频电感 | |
| 杨晨 ; 刘锋 ; 任天令 ; 刘理天 ; Albert Wang ; 岳振星 ; YANG Chen ; LIU Feng ; REN Tian-ling ; LIU Li-tian ; WANG Albert ; YUE Zhen-xing | |
| 2010-05-12 ; 2010-05-12 | |
| 关键词 | 铁氧体 电感 射频集成电路 Ferrite Inductor RF IC TN304 |
| 其他题名 | Ni-Zn Ferrite-Powder-Mixed-Photoresist Coated on-Chip RF Inductor |
| 中文摘要 | 本文报道了采用新型"纳米颗粒-光刻胶"混合旋涂技术制作的片上射频Ni-Zn铁氧体磁膜微电感。成相良好的Ni0.3Zn0.6Cu0.1Fe2O4铁氧体纳米颗粒在光刻胶中均匀混合,再将该混合物涂覆在螺旋电感线圈上,实现电感性能的提升。这种新型低温工艺避免了常规制作铁氧体器件方法带来的高温处理(>600°C)对集成电路的破坏。与无磁膜覆盖样品对比,铁氧体覆盖电感的电感量在0.1~4GHz提升了14~27%。这是实现高性能、全兼容铁氧体集成片上RFIC电感的一种很有前景的途径。; On-chip RF inductors with integrated Ni-Zn ferrite films using a novel nano-powder-mixed-photoresist coating technique is reported. Well synthesized nano-size Ni0.3Zn0.6Cu0.1Fe2O4 powders are mixed into photoresist and then coated on top of RF inductor spirals for performance improvement. This new low-temperature fabrication method is developed to eliminate any damage introduced by conventional high temperature process (>600癈) used in fabricating ferrite-integrated RF IC inductors. Measurement results show that, compared with air-cored inductor, the inductance(L) of ferrite film inductors increases by 14~27% across 0.1~4 GHz range. This work demonstrates a promising way to fabricate ferrite-integrated high-performance on-chip RF inductors in IC technology. |
| 语种 | 中文 ; 中文 |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/28516]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | 杨晨,刘锋,任天令,等. “Ni-Zn铁氧体颗粒-光刻胶”覆盖的片上射频电感[J],2010, 2010. |
| APA | 杨晨.,刘锋.,任天令.,刘理天.,Albert Wang.,...&YUE Zhen-xing.(2010).“Ni-Zn铁氧体颗粒-光刻胶”覆盖的片上射频电感.. |
| MLA | 杨晨,et al."“Ni-Zn铁氧体颗粒-光刻胶”覆盖的片上射频电感".(2010). |
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