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Method of making mosaic gratings by using a two-color heterodyne interferometer containing a reference grating
Zeng, LJ ; Li, LF
2010-05-10 ; 2010-05-10
关键词COMPRESSOR LASERS Optics
中文摘要We propose and demonstrate a two-color heterodyne interferometric method for making a perfect mosaic of two planar gratings that can substitute for a single and larger grating without introducing wavefront aberration at any wavelength. The lateral and longitudinal phase errors are separated and eliminated by use of two wavelengths in the interferometry. The accuracy of the phase difference measurement is improved by this heterodyne scheme. The method ensures that the lateral gap between the two subaperture gratings is an integer multiple of the grating period. For a pair of 0.72 mu m period gratings we experimentally achieved a lateral alignment error of less than 1% of the grating period. (c) 2006 Optical Society of America.
语种英语 ; 英语
出版者OPTICAL SOC AMER ; WASHINGTON ; 2010 MASSACHUSETTS AVE NW, WASHINGTON, DC 20036 USA
内容类型期刊论文
源URL[http://hdl.handle.net/123456789/25296]  
专题清华大学
推荐引用方式
GB/T 7714
Zeng, LJ,Li, LF. Method of making mosaic gratings by using a two-color heterodyne interferometer containing a reference grating[J],2010, 2010.
APA Zeng, LJ,&Li, LF.(2010).Method of making mosaic gratings by using a two-color heterodyne interferometer containing a reference grating..
MLA Zeng, LJ,et al."Method of making mosaic gratings by using a two-color heterodyne interferometer containing a reference grating".(2010).
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