Method of making mosaic gratings by using a two-color heterodyne interferometer containing a reference grating | |
Zeng, LJ ; Li, LF | |
2010-05-10 ; 2010-05-10 | |
关键词 | COMPRESSOR LASERS Optics |
中文摘要 | We propose and demonstrate a two-color heterodyne interferometric method for making a perfect mosaic of two planar gratings that can substitute for a single and larger grating without introducing wavefront aberration at any wavelength. The lateral and longitudinal phase errors are separated and eliminated by use of two wavelengths in the interferometry. The accuracy of the phase difference measurement is improved by this heterodyne scheme. The method ensures that the lateral gap between the two subaperture gratings is an integer multiple of the grating period. For a pair of 0.72 mu m period gratings we experimentally achieved a lateral alignment error of less than 1% of the grating period. (c) 2006 Optical Society of America. |
语种 | 英语 ; 英语 |
出版者 | OPTICAL SOC AMER ; WASHINGTON ; 2010 MASSACHUSETTS AVE NW, WASHINGTON, DC 20036 USA |
内容类型 | 期刊论文 |
源URL | [http://hdl.handle.net/123456789/25296] ![]() |
专题 | 清华大学 |
推荐引用方式 GB/T 7714 | Zeng, LJ,Li, LF. Method of making mosaic gratings by using a two-color heterodyne interferometer containing a reference grating[J],2010, 2010. |
APA | Zeng, LJ,&Li, LF.(2010).Method of making mosaic gratings by using a two-color heterodyne interferometer containing a reference grating.. |
MLA | Zeng, LJ,et al."Method of making mosaic gratings by using a two-color heterodyne interferometer containing a reference grating".(2010). |
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