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	Measurement of simulated disk/slider stationary spacing by common-path dual-frequency interferometry
	Yue Zhao-yang ; Zhang Rui ; Bai Shao-xian ; Meng Yong-gang ; Yin Chun-yong
	2010-05-10 ; 2010-05-10
关键词	Experimental/ disc drives lasers lenses light interferometry/ simulated disk-slider stationary spacing common-path dual-frequency interferometry common-path heterodyne interferometry transverse Zeeman laser birefringent lens design phase measurement technology phase shift measurement system stability calibration PZT microdrive working table mirror PZT PbZrO3TiO3/ A0760L Optical interferometry A4280A Optical lenses and mirrors/ PbZrO3TiO3/ss TiO3/ss ZrO3/ss O3/ss Pb/ss Ti/ss Zr/ss O/ss
中文摘要	A novel method for measuring the simulated disk/slider stationary spacing is proposed in this paper, based on common-path heterodyne interferometry that utilises a transverse Zeeman laser with low beat frequency and a special designed birefringent lens (as beam splitter). The phase measurement technology is adopted to divide half wavelength of light by a factor of 3600, hence a resolution of 0.1 nm can be attained. The experimental results show that in ordinary laboratory condition, without air conditioning, the shift of phase measurement about the stability of system is approximately 4 degrees in a hour, and calibration with a commercial PZT micro-drive working table (step resolution: 1 nm; extent: 1 mu m) which drives a mirror (simulative slider), gives the linearly correlation coefficient of 0.9998.
语种	中文 ; 中文
出版者	Science Press ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/25279]
专题	清华大学
推荐引用方式 GB/T 7714	Yue Zhao-yang,Zhang Rui,Bai Shao-xian,et al. Measurement of simulated disk/slider stationary spacing by common-path dual-frequency interferometry[J],2010, 2010.
APA	Yue Zhao-yang,Zhang Rui,Bai Shao-xian,Meng Yong-gang,&Yin Chun-yong.(2010).Measurement of simulated disk/slider stationary spacing by common-path dual-frequency interferometry..
MLA	Yue Zhao-yang,et al."Measurement of simulated disk/slider stationary spacing by common-path dual-frequency interferometry".(2010).

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