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	A comb driving magnetometer based on tunnel effect
	Tang Xue-hua ; You Zheng ; Yang Yong-jun ; He Hong-tao
	2010-05-10 ; 2010-05-10
关键词	Experimental/ finite element analysis machining magnetic tunnelling magnetometers micromechanical devices/ comb driving magnetometer tunnel effect FEA analysis machining processes magnetic signal/ A0755 Magnetic instruments and techniques A0710C Micromechanical devices and systems B7310L Magnetic variables measurement B7230M Microsensors
中文摘要	In this paper, a comb-driving tunneling magnetometer based on the tunneling effect is introduced. The designation, manufacture and tests of this magnetometer are discussed, including its structure, FEA analysis, machining processes and test results. The test results indicate that the chip is coincidental with the tunneling effect and the chip is capable of sensing the magnetic signal.
语种	英语 ; 英语
出版者	Balaban Publishers; Scitec Publications ; Switzerland
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/25235]
专题	清华大学
推荐引用方式 GB/T 7714	Tang Xue-hua,You Zheng,Yang Yong-jun,et al. A comb driving magnetometer based on tunnel effect[J],2010, 2010.
APA	Tang Xue-hua,You Zheng,Yang Yong-jun,&He Hong-tao.(2010).A comb driving magnetometer based on tunnel effect..
MLA	Tang Xue-hua,et al."A comb driving magnetometer based on tunnel effect".(2010).

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