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	Packaging and frequency stability of monolithic scanning QCM sensor array in liquid
	Shi Zhi-song ; Zhu Hui-zhong ; Liang Wu-di
	2010-05-10 ; 2010-05-10
关键词	Practical/ crystal resonators microbalances packaging sensor arrays/ packaging frequency stability monolithic scanning QCM sensor array quartz crystal microbalance scanning measuring circuit resonant circuit/ B7230 Sensing devices and transducers B7320M Mass and density measurement B2860A Piezoelectric devices B0170J Product packaging
中文摘要	A novel monolithic scanning QCM (quartz crystal microbalance) sensor array for detecting in liquid was investigated. The design aspects of the sensor array, the scanning measuring circuit, the resonant circuit, the packaging of the sensor array as well as the performance of the sample device immersed in liquid were investigated. The results show that the distance between electrodes has no remarkable influence to the resonators with the operation mode of scanning in turn. According to this conclusion, the configuration of the electrodes can be further optimized, thus more resonators could be integrated on the same plate. It is also shown that the frequency stability of the QCM sensor arrays could be up to about +/- 0. 2 X 10 macr /sup -6//h in gas, and +/- 0. 4 X 10/sup -6// h in liquid.
语种	中文 ; 中文
出版者	Editorial Board of Micronanoelectronic Technology ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/25028]
专题	清华大学
推荐引用方式 GB/T 7714	Shi Zhi-song,Zhu Hui-zhong,Liang Wu-di. Packaging and frequency stability of monolithic scanning QCM sensor array in liquid[J],2010, 2010.
APA	Shi Zhi-song,Zhu Hui-zhong,&Liang Wu-di.(2010).Packaging and frequency stability of monolithic scanning QCM sensor array in liquid..
MLA	Shi Zhi-song,et al."Packaging and frequency stability of monolithic scanning QCM sensor array in liquid".(2010).

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