A double common-path heterodyne interferometer for the measurement of flying height modulation | |
Lin, Dejiao ; Yue, Zhaoyang ; Song, Nanhai ; Meng, Yonggang ; Yin, Chunyong | |
2010-05-10 ; 2010-05-10 | |
关键词 | flying height Zeeman laser common-path heterodyne interferometer hard disk TOTAL INTERNAL-REFLECTION OPTICAL-CONSTANTS COMPENSATION SLIDERS Engineering, Multidisciplinary Instruments & Instrumentation |
中文摘要 | A double common-path differential heterodyne interferometer is proposed to measure the flying height modulation (FHM) of a slider in a hard disk drive. A transverse Zeeman He-Ne laser is employed as the light source and high-speed phase measurement is applied for signal processing. The resolution and the sampling frequency of FH measurement are 0.1 nm and 500 kHz, respectively. According to the symmetrical optical path design, the environmental noise and Abbe error from the disk can be adaptively compensated. The experimental results show that the stability of the system is sub-nanometer in a normal laboratory without air conditioning, and the FHM of +/- 3 nm is achieved when the pitch of the rotating disk is around 1.2 mu m. |
语种 | 英语 ; 英语 |
出版者 | IOP PUBLISHING LTD ; BRISTOL ; DIRAC HOUSE, TEMPLE BACK, BRISTOL BS1 6BE, ENGLAND |
内容类型 | 期刊论文 |
源URL | [http://hdl.handle.net/123456789/24999] |
专题 | 清华大学 |
推荐引用方式 GB/T 7714 | Lin, Dejiao,Yue, Zhaoyang,Song, Nanhai,et al. A double common-path heterodyne interferometer for the measurement of flying height modulation[J],2010, 2010. |
APA | Lin, Dejiao,Yue, Zhaoyang,Song, Nanhai,Meng, Yonggang,&Yin, Chunyong.(2010).A double common-path heterodyne interferometer for the measurement of flying height modulation.. |
MLA | Lin, Dejiao,et al."A double common-path heterodyne interferometer for the measurement of flying height modulation".(2010). |
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