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A double common-path heterodyne interferometer for the measurement of flying height modulation
Lin, Dejiao ; Yue, Zhaoyang ; Song, Nanhai ; Meng, Yonggang ; Yin, Chunyong
2010-05-10 ; 2010-05-10
关键词flying height Zeeman laser common-path heterodyne interferometer hard disk TOTAL INTERNAL-REFLECTION OPTICAL-CONSTANTS COMPENSATION SLIDERS Engineering, Multidisciplinary Instruments & Instrumentation
中文摘要A double common-path differential heterodyne interferometer is proposed to measure the flying height modulation (FHM) of a slider in a hard disk drive. A transverse Zeeman He-Ne laser is employed as the light source and high-speed phase measurement is applied for signal processing. The resolution and the sampling frequency of FH measurement are 0.1 nm and 500 kHz, respectively. According to the symmetrical optical path design, the environmental noise and Abbe error from the disk can be adaptively compensated. The experimental results show that the stability of the system is sub-nanometer in a normal laboratory without air conditioning, and the FHM of +/- 3 nm is achieved when the pitch of the rotating disk is around 1.2 mu m.
语种英语 ; 英语
出版者IOP PUBLISHING LTD ; BRISTOL ; DIRAC HOUSE, TEMPLE BACK, BRISTOL BS1 6BE, ENGLAND
内容类型期刊论文
源URL[http://hdl.handle.net/123456789/24999]  
专题清华大学
推荐引用方式
GB/T 7714
Lin, Dejiao,Yue, Zhaoyang,Song, Nanhai,et al. A double common-path heterodyne interferometer for the measurement of flying height modulation[J],2010, 2010.
APA Lin, Dejiao,Yue, Zhaoyang,Song, Nanhai,Meng, Yonggang,&Yin, Chunyong.(2010).A double common-path heterodyne interferometer for the measurement of flying height modulation..
MLA Lin, Dejiao,et al."A double common-path heterodyne interferometer for the measurement of flying height modulation".(2010).
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