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	Microstructure, mechanical properties, and oxidation resistance of nanocomposite Ti-Si-N coatings
	Zhang, C. H. ; Lu, X. C. ; Wang, H. ; Luo, J. B. ; Shen, Y. G. ; Li, K. Y.
	2010-05-10 ; 2010-05-10
关键词	Ti-Si-N coating mechanical properties oxidation resistance cutting performance CHEMICAL-VAPOR-DEPOSITION BEAM-ASSISTED DEPOSITION FILMS Chemistry, Physical Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter
中文摘要	Ti-Si-N coatings with different silicon contents (0-12 at.%) were deposited onto Si(I 0 0) wafer, AISI M42 high speed steel, and stainless steel plate, respectively. These coatings were characterized and analyzed by using a variety of analytical techniques, such as XRD, AES, SEM, XPS, nanoindentation measurements, Rockwell C-type indentation tester, and scratch tester. The results revealed that the hardness was strongly correlated to the amount of silicon addition into a growing TiN film. The maximum hardness of 47.1 GPa was achieved as the Si content was 8.6 at.%. In the mechanical and oxidation resistance measurements, the Ti-Si-N coatings showed three distinct behaviors. (i) The coatings with Si contents of no more than 8.6 at.% performed good adhesion strength quality onto the HSS substrates. (ii) The fracture toughness of the coatings decreased with the increase in Si content. (iii) The Ti-Si-N coating with 8.6 at.% Si showed the excellent oxidation resistance behavior. The cutting performance under using coolant conditions was also evaluated by a conventional drilling machine. The drills with Ti-Si-N coatings performed much better than the drills with TiN coating and the uncoated drills. (c) 2005 Elsevier B.V. All rights reserved.
语种	英语 ; 英语
出版者	ELSEVIER SCIENCE BV ; AMSTERDAM ; PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24979]
专题	清华大学
推荐引用方式 GB/T 7714	Zhang, C. H.,Lu, X. C.,Wang, H.,et al. Microstructure, mechanical properties, and oxidation resistance of nanocomposite Ti-Si-N coatings[J],2010, 2010.
APA	Zhang, C. H.,Lu, X. C.,Wang, H.,Luo, J. B.,Shen, Y. G.,&Li, K. Y..(2010).Microstructure, mechanical properties, and oxidation resistance of nanocomposite Ti-Si-N coatings..
MLA	Zhang, C. H.,et al."Microstructure, mechanical properties, and oxidation resistance of nanocomposite Ti-Si-N coatings".(2010).

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