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	Pull-in failures of electrostatic force feedback micro accelerometers
	Liu Yunfeng ; Dong Jingxin
	2010-05-10 ; 2010-05-10
关键词	Practical Experimental/ accelerometers closed loop systems control system analysis failure analysis open loop systems stability/ electrostatic force feedback microaccelerometers moveable sensing mass pull-in failure mechanism open-loop active controls closed-loop active controls stability conditions mechanical stiffness stopper gap design reliability/ B7230 Sensing devices and transducers B0170N Reliability C1310 Control system analysis and synthesis methods C1320 Stability in control theory E1640 Instrumentation E3640 Measurement and control instrumentation industry
中文摘要	Pull-in failures of electrostatic force feedback micro accelerometers occur when the electrostatic force can not overcome the adhesion of the moveable sensing mass to the wall. Pull-in failures are the main cause of failures in micro accelerometers. Remedies for such failures were developed by analyzing the pull-in failure mechanisms for open-loop and closed-loop active controls. Three stability conditions were found to be functions of the electrostatic force, the mechanical stiffness, the stopper gap, and other parameters. These conditions can be used to judge whether pull-in failure will occur. Experiments show that the stability conditions are accurate so they can be used to design reliable micro accelerometers. Proper choices of the structural and electrical parameters can entirely eliminate pull-in failures.
语种	中文 ; 中文
出版者	Tsinghua Univ. Press ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24887]
专题	清华大学
推荐引用方式 GB/T 7714	Liu Yunfeng,Dong Jingxin. Pull-in failures of electrostatic force feedback micro accelerometers[J],2010, 2010.
APA	Liu Yunfeng,&Dong Jingxin.(2010).Pull-in failures of electrostatic force feedback micro accelerometers..
MLA	Liu Yunfeng,et al."Pull-in failures of electrostatic force feedback micro accelerometers".(2010).

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