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	Mechanical properties of diamond thin films characterized by nano-indentation method
	Li Xuemin ; Wang Jiadao ; Chen Darong ; Liu Bing ; Liu Fengbin
	2010-05-10 ; 2010-05-10
关键词	Experimental/ boron chemical vapour deposition cracks CVD coatings diamond doping profiles hardness indentation Young's modulus/ nanoindentation method diamond thin films mechanical properties hot filament-assisted chemical vapor deposition method doping concentration stiffness lateral force nanoindenter system hardness Young modulus bonding strength cracking mean C:B Si/ A6860 Physical properties of thin films, nonelectronic A8140N Fatigue, embrittlement, and fracture A8140J Elasticity and anelasticity A6220M Fatigue, brittleness, fracture, and cracks A6220D Elasticity, elastic constants A6170W Impurity concentration, distribution, and gradients A6855 Thin film growth, structure, and epitaxy A8115H Chemical vapour deposition/ C:B/bin B/bin C/bin B/el C/el B/dop Si/sur Si/el
中文摘要	Boron-doped diamond (BDD) thin films were prepared on Si substrate by the hot filament-assisted chemical vapor deposition method, and the concentration of boron doping was 2 * 10/sup 20//cm/sup -3 /. The mechanical properties of the thin films related with the continuous stiffness measurement and the lateral force measurement were evaluated by using a nano indenter system. The results show that the thin films have a higher average hardness of about 30 GPa and a Young's modulus of 419 GPa. The bonding strength between the thin film and substrate is higher, and the first cracking mean value in the thin films is about 4 N. With the change of the position in the BDD films from the center to the edge, the thin film's hardness and Yong's modulus decrease gradually, but in contrast, the bonding strength increases gradually.
语种	中文 ; 中文
出版者	Chinese Ceramic Soc ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24884]
专题	清华大学
推荐引用方式 GB/T 7714	Li Xuemin,Wang Jiadao,Chen Darong,et al. Mechanical properties of diamond thin films characterized by nano-indentation method[J],2010, 2010.
APA	Li Xuemin,Wang Jiadao,Chen Darong,Liu Bing,&Liu Fengbin.(2010).Mechanical properties of diamond thin films characterized by nano-indentation method..
MLA	Li Xuemin,et al."Mechanical properties of diamond thin films characterized by nano-indentation method".(2010).

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