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	Analysis & prevention on pull-in failure of force feedback micro-accelerometer after heavy impact
	Wan Cai-xin ; Dong Jing-xin ; Liu Yun-feng
	2010-05-10 ; 2010-05-10
关键词	Practical/ accelerometers closed loop systems force feedback microsensors/ pull-in failure force feedback micro-accelerometer differential electrostatic force generator negative feedback model MEMS sensor closed loop control system feedback electrostatic forces anti-pull-in criterion/ B7230M Microsensors and nanosensors
中文摘要	An impact load causes the proof mass of a micro accelerometer greatly depart from the balance position, making the nonlinear effect of the differential electrostatic force generator show out. The consequence is that the negative feedback model is nolonger suitable, resulting in the failure of micro accelerometer. To improve its reliability, the paper analyzes the control characteristic of MEMS sensor in closed loop control system with the feedback electrostatic forces in various restrictions, and proposes an anti-pull-in criterion which shows how to determine the system parameters of micro accelerometers with known mechanical parameters of the stopper. The experiments verify that the micro-accelerometers, designed by the anti-pull-in criterion, never suffer pull-in failure even the impact far exceeds the accelerometer's maximum measurement range.
语种	中文 ; 中文
出版者	Editorial Department of the Journal of Chinese Inertial Technology ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24610]
专题	清华大学
推荐引用方式 GB/T 7714	Wan Cai-xin,Dong Jing-xin,Liu Yun-feng. Analysis & prevention on pull-in failure of force feedback micro-accelerometer after heavy impact[J],2010, 2010.
APA	Wan Cai-xin,Dong Jing-xin,&Liu Yun-feng.(2010).Analysis & prevention on pull-in failure of force feedback micro-accelerometer after heavy impact..
MLA	Wan Cai-xin,et al."Analysis & prevention on pull-in failure of force feedback micro-accelerometer after heavy impact".(2010).

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