| Measurement of period difference in grating pair based on analysis of far-field intensity patterns | |
| Guo, Chao ; Zeng, Lijiang | |
| 2010-05-10 ; 2010-05-10 | |
| 关键词 | grating pair period difference far-field intensity pattern Littrow-angle difference RANGE DIFFRACTOMETRY ACCURATE PROFILER Optics |
| 中文摘要 | We propose and demonstrate an experimental method for measuring the period difference in grating pair. The method uses the compensating relationship between line-density difference and the Littrow-angle difference of gratings. Far-field intensity patterns of 0th- and -1st-orders diffraction beams are monitored for alignment during the angle measurement. For a pair of similar to 0.676 mu m period gratings, the relative period difference was measured to be 798.4 x 10(-6) with a standard deviation of 2.0 x 10(-6). (C) 2008 Elsevier B.V. All rights reserved. |
| 语种 | 英语 ; 英语 |
| 出版者 | ELSEVIER SCIENCE BV ; AMSTERDAM ; PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/24577]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | Guo, Chao,Zeng, Lijiang. Measurement of period difference in grating pair based on analysis of far-field intensity patterns[J],2010, 2010. |
| APA | Guo, Chao,&Zeng, Lijiang.(2010).Measurement of period difference in grating pair based on analysis of far-field intensity patterns.. |
| MLA | Guo, Chao,et al."Measurement of period difference in grating pair based on analysis of far-field intensity patterns".(2010). |
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