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	Evaluation on the figure errors of optical aspheric surfaces after magnetorheological polishing
	Cheng Haobo ; Feng Zhijing ; Wang Yingwei
	2010-05-10 ; 2010-05-10
关键词	Practical Theoretical or Mathematical Experimental/ aspherical optics error analysis magnetorheology mirrors optical fabrication polishing/ residual figure errors optical aspheric surfaces magnetorheological polishing process PSD power spectral density residual errors evaluation magnetorheological polishing model parabolic mirror manufacturing control degrees of freedom aspheric component fabrication/ A4285D Optical fabrication, surface grinding A4280A Optical lenses and mirrors A4215E Optical system design E3644N Optoelectronics manufacturing E1520N Surface treatment and coating techniques E0210L Numerical analysis
中文摘要	A method combining the power spectral density (PSD) and residual errors evaluation was developed to accurately evaluate the residual figure errors on aspheric surfaces after polishing. By applying the PSD and residual errors evaluation criterion to the magnetorheological polishing (MRP) process, the relationship between the residual errors and polishing processes was determined, which is helpful to establish the MRP model. A parabolic mirror was manufactured according to the criterion with a final figure accuracy up to 1/30 of the wavelength lambda ( lambda =0.632 8 mu m) and residual errors less than 3/1 000 of lambda . Experimental results indicate that the method can provide wider control degrees of freedom for decreasing figure errors during fabricating aspheric components by MRP.
语种	中文 ; 中文
出版者	Tsinghua Univ. Press ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24396]
专题	清华大学
推荐引用方式 GB/T 7714	Cheng Haobo,Feng Zhijing,Wang Yingwei. Evaluation on the figure errors of optical aspheric surfaces after magnetorheological polishing[J],2010, 2010.
APA	Cheng Haobo,Feng Zhijing,&Wang Yingwei.(2010).Evaluation on the figure errors of optical aspheric surfaces after magnetorheological polishing..
MLA	Cheng Haobo,et al."Evaluation on the figure errors of optical aspheric surfaces after magnetorheological polishing".(2010).

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