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Evaluating modulus and hardness enhancement in evaporated Cu/W multilayers
Wen, S. P. ; Zong, R. L. ; Zeng, F. ; Gao, Y. ; Pan, F.
2010-05-10 ; 2010-05-10
关键词modulus enhancement hardness Cu/W multilayers nanoindentation supermodulus MECHANICAL-PROPERTIES THIN-FILMS METALLIC MULTILAYERS ELASTIC-MODULUS SUPERLATTICES COMPOSITES COATINGS MICROINDENTATION STRESSES BEHAVIOR Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering
中文摘要The microstructure, hardness and elastic modulus of Cu/W multilayers prepared by evaporation deposition were investigated by Xray diffraction, transmission electron microscopy and nanoindenation. The results show that the multilayers with good modulation structure have asymmetrical interfaces. The W on Cu interfaces are relatively sharp, while the Cu on W interfaces are diffuse, with significant intermixing. The intermixing results in compression of the out-of-plane interplanar spacing of the W layer. The compression increases with decreasing periodicity and leads to modulus enhancement. The hardness values also increase with decreasing periodicity, which is interpreted by the Lehoczky model. (c) 2006 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
语种英语 ; 英语
出版者PERGAMON-ELSEVIER SCIENCE LTD ; OXFORD ; THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND
内容类型期刊论文
源URL[http://hdl.handle.net/123456789/21629]  
专题清华大学
推荐引用方式
GB/T 7714
Wen, S. P.,Zong, R. L.,Zeng, F.,et al. Evaluating modulus and hardness enhancement in evaporated Cu/W multilayers[J],2010, 2010.
APA Wen, S. P.,Zong, R. L.,Zeng, F.,Gao, Y.,&Pan, F..(2010).Evaluating modulus and hardness enhancement in evaporated Cu/W multilayers..
MLA Wen, S. P.,et al."Evaluating modulus and hardness enhancement in evaporated Cu/W multilayers".(2010).
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