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	Investigation of high-quality ZnO film on polycrystalline diamond wafer for fabrication of high frequency SAW filter
	Wang, X.B. ; Chen, J.J. ; Li, D.M. ; Zeng, F. ; Pan, F.
	2010-05-10 ; 2010-05-10
关键词	Application Practical Experimental/ II-VI semiconductors interdigital transducers piezoelectricity semiconductor thin films sputter deposition surface acoustic wave filters surface roughness zinc compounds/ polycrystalline diamond wafer high frequency SAW filter piezoelectric property surface acoustic wave filter application dc reactive magnetron sputtering sputtering pressure substrate temperature surface flatness resistivity interdigital-transducer electron evaporation 5.3 nm Al-ZnO-C/ A8115C Deposition by sputtering A6855 Thin film growth, structure, and epitaxy A7760 Piezoelectricity and electrostriction A4388 Transduction devices for the generation and reproduction of sound B0520B Sputter deposition B1270D Passive filters and other passive networks B2860C Acoustic wave devices/ size 5.3E-09 m/ Al-ZnO-C/int ZnO/int Al/int Zn/int C/int O/int ZnO/bin Zn/bin O/bin Al/el C/el
中文摘要	ZnO films with piezoelectric properties were deposited on polycrystalline diamond wafers for high frequency surface acoustic wave filter applications by dc reactive magnetron sputtering. The influences of different sputtering pressures and substrate temperatures on the properties of ZnO films were discussed. Highly c-axis oriented, fine-grain ZnO films with excellent surface flatness (average surface roughness of 5.3 nm) and high resistivities (6.3 * 10/sup 7/ Omega -cm) have been obtained. Then Al films for interdigital-transducer were deposited on ZnO/diamond by electron evaporation, a 2.48 GHz longitudinally-coupled double-mode surface acoustic wave filter has been fabricated using the Al/ZnO film on diamond wafer.
语种	英语 ; 英语
出版者	Trans Tech Publications ; Switzerland
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/21594]
专题	清华大学
推荐引用方式 GB/T 7714	Wang, X.B.,Chen, J.J.,Li, D.M.,et al. Investigation of high-quality ZnO film on polycrystalline diamond wafer for fabrication of high frequency SAW filter[J],2010, 2010.
APA	Wang, X.B.,Chen, J.J.,Li, D.M.,Zeng, F.,&Pan, F..(2010).Investigation of high-quality ZnO film on polycrystalline diamond wafer for fabrication of high frequency SAW filter..
MLA	Wang, X.B.,et al."Investigation of high-quality ZnO film on polycrystalline diamond wafer for fabrication of high frequency SAW filter".(2010).

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