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	Effects of incidence angles on the microstructure of Co-Nb thin films prepared by ion beam assisted deposition
	Pan, F. ; Li, X.W. ; Ding, Y.Q. ; Zeng, F.
	2010-05-10 ; 2010-05-10
关键词	Experimental/ amorphous state annealing cobalt alloys internal stresses ion beam assisted deposition metallic thin films niobium alloys phase transformations thermal stability/ incidence angles effects microstructure evolution thin films ion beam assisted deposition thin film morphology thermal stability ion current density amorphous alloy annealing bcc metastable phase amorphous phase mixing thermal spike internal stress 4 keV 300 C 450 C 30 min CoNb/ A6855 Thin film growth, structure, and epitaxy A8115J Ion plating and other vapour deposition A8140G Other heat and thermomechanical treatments A6860 Physical properties of thin films, nonelectronic A6470K Solid-solid transitions/ electron volt energy 4.0E+03 eV temperature 5.73E+02 K temperature 7.23E+02 K time 1.8E+03 s/ CoNb/bin Co/bin Nb/bin
中文摘要	Ion incidence angle plays an important role during the ion beam assisted deposition process. In this study, incidence angle effects on the microstructure, morphology and thermal stability of Co/sub 30/Nb/sub 70/ thin films deposited by ion beam assisted deposition have been investigated. The films were deposited at a fixed ion energy of 4 keV and ion current density of 12 mu A/cm/sup 2/. The experimental results show that Co/sub 30/Nb/sub 70/ amorphous alloy is formed, when incidence angles are from 0 degrees to 75 degrees . To investigate stability versus incidence angle, all the samples were annealed at 300 degrees C and 450 degrees C, respectively. It was found that most of the Co/sub 30/Nb/sub 70/ films remained amorphous after being annealed at 300 degrees C for 30 min, while a bcc metastable phase appeared in the film deposited with incidence angle of 45 degrees . After being annealed at 450 degrees C for 30 min, the new bcc phase dissolved into amorphous phase again and some films became partially crystallized. The possible mechanism of microstructure evolution is discussed in terms of the mixing, thermal spike, internal stress, and the variations of the process of film growth induced by incidence angles. [All rights reserved Elsevier].
语种	英语 ; 英语
出版者	Elsevier ; Switzerland
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/20822]
专题	清华大学
推荐引用方式 GB/T 7714	Pan, F.,Li, X.W.,Ding, Y.Q.,et al. Effects of incidence angles on the microstructure of Co-Nb thin films prepared by ion beam assisted deposition[J],2010, 2010.
APA	Pan, F.,Li, X.W.,Ding, Y.Q.,&Zeng, F..(2010).Effects of incidence angles on the microstructure of Co-Nb thin films prepared by ion beam assisted deposition..
MLA	Pan, F.,et al."Effects of incidence angles on the microstructure of Co-Nb thin films prepared by ion beam assisted deposition".(2010).

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