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	Electrophoretic deposition of Pb(Zr,Ti)O/sub 3/ powder on Si wafer: morphological change across film thickness
	Ni Kang ; Jing-Feng Li
	2010-05-10 ; 2010-05-10
关键词	Experimental/ crystal morphology electrophoretic coating techniques lead compounds particle size piezoceramics powders/ electrophoretic deposition powder Si wafer microstructure film thickness PZT thick films powder packing behavior silicon substrates suspending medium ethanol solution surface charges Pt-Ti-SiO/sub 2/-Si substrates constant electrical field Derjauin-Landau-Verwey-Overbeek theory particle size Pt-Ti-SiO/sub 2/-Si PZT PbZrO3TiO3/ A8115L Deposition from liquid phases (melts and solutions) A8245 Electrochemistry and electrophoresis A8120E Powder techniques, compaction and sintering A6140G Structure of powders and porous materials A7760 Piezoelectricity and electrostriction B0520J Deposition from liquid phases B0580 Powders and porous materials (engineering materials science) B0540 Ceramics and refractories (engineering materials science) B2810F Piezoelectric and ferroelectric materials/ PtTiSiO2Si/sur SiO2/sur O2/sur Pt/sur Si/sur Ti/sur O/sur PtTiSiO2Si/ss SiO2/ss O2/ss Pt/ss Si/ss Ti/ss O/ss PbZrO3TiO3/ss TiO3/ss ZrO3/ss O3/ss Pb/ss Ti/ss Zr/ss O/ss
中文摘要	PZT thick films were prepared using electrophoretic deposition (EPD) process with special emphasis placed on the powder packing behavior on silicon substrates. The suspending medium used was an ethanol solution containing an appropriate amount of HCl to introduce surface charges to the Pb(Zr,Ti)O/sub 3/ particles, which were deposited on Pt/Ti/SiO/sub 2//Si substrates under a constant electrical field. It was found that the deposited microstructure gradually changed across the film thickness: large particles were initially deposited, followed by the deposition of small particles. Such a phenomenon was explained by using the Derjauin-Landau-Verwey-Overbeek (DLVO) theory which considers a particle size effect on the surface charge responsible for the EPD process.
语种	英语 ; 英语
出版者	Ceramic Soc. Japan ; Japan
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/20746]
专题	清华大学
推荐引用方式 GB/T 7714	Ni Kang,Jing-Feng Li. Electrophoretic deposition of Pb(Zr,Ti)O/sub 3/ powder on Si wafer: morphological change across film thickness[J],2010, 2010.
APA	Ni Kang,&Jing-Feng Li.(2010).Electrophoretic deposition of Pb(Zr,Ti)O/sub 3/ powder on Si wafer: morphological change across film thickness..
MLA	Ni Kang,et al."Electrophoretic deposition of Pb(Zr,Ti)O/sub 3/ powder on Si wafer: morphological change across film thickness".(2010).

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