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	Photoluminescence and structural properties of Si nanoparticles embedded in SiO/sub 2/ matrix by reactive RF magnetron sputtering
	Ma, K. ; Feng, J.Y.
	2010-05-10 ; 2010-05-10
关键词	Experimental/ annealing elemental semiconductors infrared spectra nanoparticles photoluminescence precipitation Raman spectra silicon silicon compounds sputter deposition/ silicon nanoparticles silicon dioxide matrix reactive RF magnetron sputtering silicon-rich silicon oxide films annealing precipitation near infrared photoluminescence infrared absorption spectra Raman spectra 600 to 1100 C 2 h SiO/sub 2/:Si/ A7865H Optical properties of elemental semiconductors (thin films/low-dimensional structures) A7855C Photoluminescence in elemental semiconductors A7830L Infrared and Raman spectra in disordered solids A6146 Structure of solid clusters, nanoparticles, nanotubes and nanostructured materials A8115C Deposition by sputtering A8140G Other heat and thermomechanical treatments A8130M Precipitation A6855 Thin film growth, structure, and epitaxy/ temperature 8.73E+02 to 1.37E+03 K time 7.2E+03 s/ SiO2:Si/bin SiO2/bin O2/bin Si/bin O/bin Si/el Si/dop
中文摘要	In the present work, we investigate the photoluminescence (PL) and structural properties of Si nanoparticles embedded in SiO/sub 2/ matrix. Si-rich silicon oxide (SRSO) films with Si concentration of 39% were synthesized by reactive RF magnetron sputtering. Annealing was performed at temperatures between 600 degrees C and 1100 degrees C in N/sub 2 / ambient for 2 h to precipitate Si nanoparticles from oxide matrix. Near infrared photoluminescence around 750 nm can be clearly observed even in the as-deposited films, which indicates the existence of Si nanoparticles in films. The structural properties were analyzed by infrared absorption and Raman spectra. It is found that the structural properties strongly affect the PL properties of Si nanoparticles embedded in SiO/sub 2/ matrix.
语种	英语 ; 英语
出版者	Trans Tech Publications ; Switzerland
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/20616]
专题	清华大学
推荐引用方式 GB/T 7714	Ma, K.,Feng, J.Y.. Photoluminescence and structural properties of Si nanoparticles embedded in SiO/sub 2/ matrix by reactive RF magnetron sputtering[J],2010, 2010.
APA	Ma, K.,&Feng, J.Y..(2010).Photoluminescence and structural properties of Si nanoparticles embedded in SiO/sub 2/ matrix by reactive RF magnetron sputtering..
MLA	Ma, K.,et al."Photoluminescence and structural properties of Si nanoparticles embedded in SiO/sub 2/ matrix by reactive RF magnetron sputtering".(2010).

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