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	A novel piezoelectric micro-motor using multilayer Co-firing piezoelectric ceramics
	Ye Ji ; Xiangcheng Chu ; Longtu Li ; Zhilun Gui
	2010-05-10 ; 2010-05-10
关键词	Practical Theoretical or Mathematical Experimental/ cobalt finite element analysis firing (materials) micromotors multilayers piezoceramics stators ultrasonic motors/ piezoelectric micromotor multilayer cobalt-firing piezoelectric ceramics traveling wave ultrasonic motor piezoelectric ceramic ring prototype motor finite element method stator Doppler laser vibrometer voltage 12 V frequency 64.91 kHz Co/ B8340M Micromotors B2575 MEMS and NEMS device technology B2860 Piezoelectric and ferroelectric devices B8340C Piezoelectric motors B8310 a.c. machines B8320 d.c. machines B0290T Finite element analysis C3260P Microactuators C3260B Electric actuators and final control equipment/ voltage 1.2E+01 V frequency 6.491E+04 Hz/ Co/int Co/el
中文摘要	A novel rotary piezoelectric micro-motor ( phi 8 mm*10 mm) is proposed in this paper. Different from the conventional traveling wave ultrasonic motor using piezoelectric ceramic ring, four multilayer co-firing piezoelectric ceramic bulks (2 mm*2 mm*3 mm) are used to generate vibration in the ring type stator. The layout and electric signals applied to the piezoelectric ceramic bulks are designed for the purpose of generating elliptical trajectories on the surface of the stator. The working mode of the prototype motor is simulated by the finite element method, and also measured by the Doppler Laser Vibrometer. The experimental results are in good agreement with simulation, which verifies the effectiveness of the finite element model. The prototype motor is driven at the low voltage of 12 V under the frequency of 64.91 KHz.
语种	英语 ; 英语
出版者	Trans Tech Publications Ltd. ; Switzerland
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/20325]
专题	清华大学
推荐引用方式 GB/T 7714	Ye Ji,Xiangcheng Chu,Longtu Li,et al. A novel piezoelectric micro-motor using multilayer Co-firing piezoelectric ceramics[J],2010, 2010.
APA	Ye Ji,Xiangcheng Chu,Longtu Li,&Zhilun Gui.(2010).A novel piezoelectric micro-motor using multilayer Co-firing piezoelectric ceramics..
MLA	Ye Ji,et al."A novel piezoelectric micro-motor using multilayer Co-firing piezoelectric ceramics".(2010).

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