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	Design and analysis on micro-worktable using novel symmetric flexure hinge based on micro-assembly - art. no. 60400F
	Duan, RL ; Li, YH ; Li, QX ; Gong, J
	2010-05-10 ; 2010-05-10
会议名称	ICMIT 2005: Mechatronics, MEMS, and Smart Materials ; 3rd International Conference on Mechatronics and Information Technology (ICMIT 05) ; Chongqing, PEOPLES R CHINA ; Web of Science
关键词	Micro-Electro- Mechanical System (MEMS) micro-positioning worktable flexible hinge piezoelectric-actuator micro-assembly FEM micro-manipulation static performance testing Engineering, Electrical & Electronic Engineering, Mechanical Instruments & Instrumentation Materials Science, Multidisciplinary
中文摘要	Micro-worktable is an important part of a micro-assembly system, and it implements the translation along X- and Y- axes and the rotation along X-, Y- and Z-axes of the assembly system. In order to amplify the micro-worktable displacement output and improve the micro-positioning accuracy, a novel 3-DOF organ-drive-inspecting micro-positioning worktable was designed and analyzed using modified double-parallelogram symmetrical structure flexure hinge and piezoelectric-actuators. For the symmetric mechanism effectively eliminated the coupling deflection angle and limited the vertical direction motion, the modified double-parallelogram flexure hinge increased the output displacement of X, Y and Z axes. Finite element model of the micro-worktable was established in ANSYS to make its static performances simulation by finite elements method (FEM). Simulation results showed that stiffness and accuracy of the modified double-parallelogram flexure hinge mechanism are higher than general double-parallelogram flexure hinge mechanism, and output displacement linearity is better than single-parallelogram flexure hinge mechanism. Flexure hinge mechanism and piezoelectric-actuator self-features reduce the system complexity, coupling displacement error, and also assure the stable accuracy, high resolution, and high frequent-response of the micro-positioning worktable. Finally, static performance was tested and analyzed through experiments. In experiments, the piezoelectric-power provided voltage to drive the micro-positioning worktable along X, Y and Z axes, and an electric inductance micrometer dial was used to measure the output displacement. Experimental results show that the resolution is 0.04 m for displacement in X, Y, and Z axes, and the maximum stroke length reaches 6 mu m. The design meets with the requirement of the micro-assembly system.
会议录出版者	SPIE-INT SOC OPTICAL ENGINEERING ; BELLINGHAM ; 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/19528]
专题	清华大学
推荐引用方式 GB/T 7714	Duan, RL,Li, YH,Li, QX,et al. Design and analysis on micro-worktable using novel symmetric flexure hinge based on micro-assembly - art. no. 60400F[C]. 见:ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 3rd International Conference on Mechatronics and Information Technology (ICMIT 05), Chongqing, PEOPLES R CHINA, Web of Science.

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