| A multi-wavelength heterodyne optical zooming method based on double grating interferometer | |
| Zeng, Lijiang ; Guo, Chao | |
| 2010-05-10 ; 2010-05-10 | |
| 会议名称 | 7th International Symposium on Measurement Technology and Intelligent Instruments ; 7th Symposium on Measurement Technology and Intelligent Instruments ; Huddersfield, ENGLAND ; Web of Science ; INSPEC |
| 关键词 | Computer Science, Artificial Intelligence Nanoscience & Nanotechnology Instruments & Instrumentation |
| 中文摘要 | A multi-wavelength heterodyne optical zooming method based on double grating interferometer was proposed for nanometer measurement. The zooming factor K can be adjusted easily by changing the wavelength striking on a sensing mirror and two compensating mirrors, allowing us to measure the displacement with different accuracy by using the same laser sources. Moreover, the heterodyne signal generated by vibrating a grating ensures the measurement of displacement with high signal to noise ratio.; Univ Huddersfield |
| 会议录出版者 | IOP PUBLISHING LTD ; BRISTOL ; DIRAC HOUSE, TEMPLE BACK, BRISTOL BS1 6BE, ENGLAND |
| 语种 | 英语 ; 英语 |
| 内容类型 | 会议论文 |
| 源URL | [http://hdl.handle.net/123456789/19472]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | Zeng, Lijiang,Guo, Chao. A multi-wavelength heterodyne optical zooming method based on double grating interferometer[C]. 见:7th International Symposium on Measurement Technology and Intelligent Instruments, 7th Symposium on Measurement Technology and Intelligent Instruments, Huddersfield, ENGLAND, Web of Science, INSPEC. |
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