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	A fluid-solid coupling modal analysis of piezoelectrically actuated microjet and the frequency design of nozzles layout
	Feng, YY ; Zhou, ZY ; Wang, GH
	2010-05-10 ; 2010-05-10
会议名称	Microfluidics, BioMEMS, and Medical Microsystems III ; Conference on Microfludics, BioMEMS, and Medical Microsystems III ; San Jose, CA ; Web of Science ; INSPEC
关键词	modal analysis fluid-solid coupling Microjet MEMS Engineering, Biomedical Instruments & Instrumentation
中文摘要	A 3D model of a piezoelectrically actuated microjet was built to characterize acoustic wave propagation in liquid produced by the vibration of a piezoelectric transducer. The model considered the coupling between the piezoelectric transducer, the liquid and the nozzle film. Modal analysis was carried out based on numerical simulation to study the field of pressure wave. The contours of amplitude of pressure wave on the liquid-solid interface at the nozzles inlet were obtained under different resonant frequency. The results demonstrated that the transducer dominated vibration mode with an axis-symmetric distribution is more efficient for the device operation than others. The results also indicated that pressure distribution in the liquid chamber is related to driven frequencies in a different way from that of displacement of structure. The impedance analyzer was used to measure the resonant frequencies of the microjet system and validate the simulation results experimentally. The experimental results agreed well with the predicted. The microjet we developed has the optimum frequency of about 36.5KHz, which corresponds to the first axis-symmetric vibration mode dominated by the transducer, as is predicted well by the simulation result. According to comparison of pressure wave field with nozzle layout of present design under different resonant frequencies, the phenomena that the microjet behaves differently under different orders of resonant vibration are explained, and a frequency design for nozzles layout are presented according to the simulation result.
会议录出版者	SPIE-INT SOC OPTICAL ENGINEERING ; BELLINGHAM ; 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/19432]
专题	清华大学
推荐引用方式 GB/T 7714	Feng, YY,Zhou, ZY,Wang, GH. A fluid-solid coupling modal analysis of piezoelectrically actuated microjet and the frequency design of nozzles layout[C]. 见:Microfluidics, BioMEMS, and Medical Microsystems III, Conference on Microfludics, BioMEMS, and Medical Microsystems III, San Jose, CA, Web of Science, INSPEC.

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