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	Highly precise nonlinear error calibrating system based on Fabry-Perot interferometer
	Jichi Ma ; Yan Li ; Chunyong Yin
	2010-05-10 ; 2010-05-10
会议名称	Proceedings of the SPIE - The International Society for Optical Engineering ; Optical Design and Testing III ; Beijing, China ; INSPEC
关键词	Experimental/ calibration Fabry-Perot interferometers light interference refractive index/ nonlinear error calibrating system Fabry-Perot interferometer refrective index temperature excursion vacuum system interference light path/ A0620H Measurement standards and calibration A0760L Optical interferometry
中文摘要	Nanometer measurement has become more and more important in the development of metrology, material science, microelectronics and biology. Heterodyne Fabry-Perot interferometer can be used in the nonlinear error calibration with an accuracy of nanometer and sub-nanometer order. We can get very high resolution by using heterodyne Fabry-Perot interferometer frequency locking technique in theory. However, the measure uncertainty and the stability of results are worse than the expectation's. In this paper, in order to solve the problems of air refrective index change and temperature excursion, we designed the vacuum system that adjusts the interference light path and built it based on NIM's heterodyne Fabry-Perot interferometer. The key in our design is to reduce the thermic balance time and to ensure reliable hermetization of movable components. The influnce of the change of air refractive index to the measured precision was studied, and the approximate formula of vacuum degree that the system requires was concluded. It has been proved in the experiment that the system works steadily. The system's ability of anti-jamming has been improved, and the demand of the measure surroundings has been lowered. Comparing with capacitance displacement measurement instrument, we conclude that the nonlinear degree of this system in the range of 0.35um, which is longer than half of the wavelength of the laser, is better than 3.9nm.
会议录出版者	SPIE - The International Society for Optical Engineering ; USA
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/19298]
专题	清华大学
推荐引用方式 GB/T 7714	Jichi Ma,Yan Li,Chunyong Yin. Highly precise nonlinear error calibrating system based on Fabry-Perot interferometer[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering, Optical Design and Testing III, Beijing, China, INSPEC.

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