QQ客服 官方微博 反馈留言

	A Micro Electro-Mechanical System design and manufacture considering fabrication error - art. no. 68360G
	Li Hua ; Shi Gengchen
	2010-05-10 ; 2010-05-10
会议名称	MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III ; Conference on MEMS/MOEMS Technologies and Applications III ; San Jose, CA ; Web of Science
关键词	LIGA technology fabrication error MEMS assembling Engineering, Electrical & Electronic Optics
中文摘要	MEMS fabrication technology has very high fabrication precision, but there is still fabrication error inevitably like any other fabrication technology. We adopt LIGA technology to fabricate a Micro Electro-Mechanical System. From the analysis of fabrication process, the fabrication errors of MEMS part consist of mask and LIGA fabrication error. The designed MEMS parts can be divided into metal and PMMA part. Synthesizing the mask and LIGA fabrication errors, the errors of metal entity and cavity structure are -10.5 mu m similar to +5.5 mu m and similar to 5.5 mu m similar to +10.5 mu m. The errors of PMMA entity and cavity structure are -5 mu m similar to +10 mu m and -10 mu m similar to +5 mu m. Analyzing each situation, the most interference dimension of the four assembling situations is 20 mu m. According to the conclusion, we leave 10 mu m margin for each of the two parts assembling together. So the whole margin of the two parts is 20 mu m, which ensures that the two MEMS parts can be assembled reliably. Measuring the fabricated MEMS part with a micro precision measurement equipment indicated that the fabrication error was in the scope of theoretical analysis. The fabricated LIGA MEMS system can be assembled reliably and the centrifugal experiment indicated that the motional part worked well and moved to the destination position.
会议录出版者	SPIE-INT SOC OPTICAL ENGINEERING ; BELLINGHAM ; 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/19174]
专题	清华大学
推荐引用方式 GB/T 7714	Li Hua,Shi Gengchen. A Micro Electro-Mechanical System design and manufacture considering fabrication error - art. no. 68360G[C]. 见:MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III, Conference on MEMS/MOEMS Technologies and Applications III, San Jose, CA, Web of Science.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。