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Error analysis of frequency mixing on heterodyne interferometry detecting device for superfinish surface scratch
Haoshan Lin ; Yuhe Li ; Dongsheng Wang ; Mei Liu
2010-05-10 ; 2010-05-10
会议名称Proceedings of the SPIE - The International Society for Optical Engineering ; Ninth International Symposium on Laser Metrology ; Singapore, Singapore ; INSPEC
关键词Practical Theoretical or Mathematical Experimental/ birefringence error analysis heterodyne detection lenses light interferometry light polarisation matrix algebra measurement by laser beam measurement errors optical beam splitters photodiodes precision engineering surface topography measurement/ error analysis frequency mixing heterodyne interferometry superfinish surface scratch precision measurement birefringent lens beam splitter cantilever tip surface topography optical nonlinear errors Jones matrix elliptic polarization phase retardation measurement errors photodiode detecter vector theory periodic errors/ A4262E Metrological applications of lasers A0210 Algebra, set theory, and graph theory A4280H Optical beam splitters A0760L Optical interferometry A0630C Spatial variables measurement A0260 Numerical approximation and analysis A0620D Measurement and error theory A4280A Optical lenses and mirrors B4360E Metrological applications of lasers B4250 Photoelectric devices B0290H Linear algebra (numerical analysis) B4190 Other optical system components B7110 Measurement theory B0290B Error analysis in numerical methods B7320C Spatial variables measurement
中文摘要The precision measurement on surperfinish surface scratch has been currently paid much attention to on electronic products. To meet these demands, a novel method has been proposed which is based on heterodyne interferometry that utilizes birefringent lens as beam splitter and cantilever tip as scanning probe to get the measurement values of sample topography. But the optical nonlinear errors affect the measurement precision of the system. In this paper, we adopt the Jones matrix to analyze the elliptic polarization caused by the three factors existing at the same time, which are polarization ellipticity of laser source, installation orientation error and phase retardation of birefringent lens. The measurement errors of frequency mixing about these elliptic polarization beams arriving at the photodiode detecter are studied by vector theory. The results show that the measurement errors are periodic errors, and they will change from 1.24 nm to 3.94 nm when the magnitude of orientation error of birefringent lens changes from 1 degrees to 5 degrees . Also, the methods of reducing measurement errors according to the numerical results in the system are suggested. The measurement precision will be improved by reducing the orientation error or choosing high performance laser source.
会议录出版者SPIE - The International Society for Optical Engineering ; USA
语种英语 ; 英语
内容类型会议论文
源URL[http://hdl.handle.net/123456789/19125]  
专题清华大学
推荐引用方式
GB/T 7714
Haoshan Lin,Yuhe Li,Dongsheng Wang,et al. Error analysis of frequency mixing on heterodyne interferometry detecting device for superfinish surface scratch[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering, Ninth International Symposium on Laser Metrology, Singapore, Singapore, INSPEC.
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