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	Preparation and characterization of Pb(Zr,Ti)O3 films on SrTiO3 substrates
	Gong, W ; Li, JF ; Chu, XC ; Li, LT
	2010-05-10 ; 2010-05-10
会议名称	PRICM 5: THE FIFTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-5 ; 5th Pacific Rim International Conference on Advanced Materials and Processing ; Beijing, PEOPLES R CHINA ; Web of Science
关键词	PZT thin films SrTiO3 epitaxial growth sol-gel TI)O-3 THIN-FILMS PREFERENTIAL ORIENTATION ELECTRICAL-PROPERTIES PB(ZR Materials Science, Multidisciplinary
中文摘要	Pb(Zr,Ti)O-3 (PZT) thin films have attracted great attention due to their superior ferroelectric, pyroelectric and piezoelectric properties. The epitaxial films on single-crystal substrates are expected to possess enhanced properties compared with polycrystalline films on conventional silicon wafers. We prepared epitaxial PZT films on STO (STO) substrates with different orientation by using a sot-gel method. The preparation parameters were optimized to improve crystallization of the films. Although the films were of the same composition and prepared under the same condition, different crystal phases with corresponding preferential film orientations were formed when the substrate orientation was changed. [001]-oriented tetragonal PZT film was formed on the {100} surface of the STO substrate, whereas [111]-oriented rhombohedral PZT film on the {111} surface.
会议录出版者	TRANS TECH PUBLICATIONS LTD ; ZURICH-UETIKON ; BRANDRAIN 6, CH-8707 ZURICH-UETIKON, SWITZERLAND
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/18233]
专题	清华大学
推荐引用方式 GB/T 7714	Gong, W,Li, JF,Chu, XC,et al. Preparation and characterization of Pb(Zr,Ti)O3 films on SrTiO3 substrates[C]. 见:PRICM 5: THE FIFTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-5, 5th Pacific Rim International Conference on Advanced Materials and Processing, Beijing, PEOPLES R CHINA, Web of Science.

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