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	Photoluminescence and structural properties of Si nanoparticles embedded in SiO2 matrix by reactive RF magnetron sputtering
	Ma, K. ; Feng, J. Y.
	2010-05-10 ; 2010-05-10 ; OCT 23-26, 2005
会议名称	High-Performance Ceramics IV, Pts 1-3 ; 4th China International Conference on High-Performance Ceramics (CICC-4) ; Chengdu, PEOPLES R CHINA ; Web of Science
关键词	si nanoparticles photoluminescence structural properties NANOCRYSTALS FILMS Materials Science, Ceramics Materials Science, Composites
中文摘要	In the present work, we investigate the photoluminescence (PL) and structural properties of Si nanoparticles embedded in SiO2 matrix. Si-rich silicon oxide (SRSO) films with Si concentration of 39% were synthesized by reactive RF magnetron sputtering. Annealing was performed at temperatures between 600 degrees C and 1100 degrees C in N-2 ambient for 2h to precipitate Si nanoparticles from oxide matrix. Near infrared photoluminescence around 750nm can be clearly observed even in the as-deposited films, which indicates the existence of Si nanoparticles in films. The structural properties were analyzed by infrared absorption and Raman spectra. It is found that the structural properties strongly affect the PL properties of Si nanoparticles embedded in SiO2 matrix.
会议录出版者	TRANS TECH PUBLICATIONS LTD ; STAFA-ZURICH ; LAUBLSRUTISTR 24, CH-8717 STAFA-ZURICH, SWITZERLAND
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/18194]
专题	清华大学
推荐引用方式 GB/T 7714	Ma, K.,Feng, J. Y.. Photoluminescence and structural properties of Si nanoparticles embedded in SiO2 matrix by reactive RF magnetron sputtering[C]. 见:High-Performance Ceramics IV, Pts 1-3, 4th China International Conference on High-Performance Ceramics (CICC-4), Chengdu, PEOPLES R CHINA, Web of Science.

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