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	Withdrawal weighting image-impedance connected SAW filters with Al-Mo alloy electrodes
	Li, Dongmei ; Wang, Xubo ; Pan, Feng
	2010-05-10 ; 2010-05-10
会议名称	RARE METAL MATERIALS AND ENGINEERING ; 6th East Asian Conference on Chemical Sensors (EACCS-6) ; Guillin, PEOPLES R CHINA ; Web of Science
关键词	Al-Mo films adhesion surface acoustic wave Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering
中文摘要	To obtain high reliability of surface acoustic wave (SAW) devices, Mo was added to Al electrodes on 128 degrees Y-X LiNbO3 substrates by a d.c. magnetron sputtering deposition. Influence of Mo additive on the mechanical properties of Al films was investigated. It was found that the Al-Mo alloy films displayed a superior adhesion to substrates. With the Al-Mo alloy films, a 1.65 GHz-range image-impedance connected SAW filter was designed and fabricated. In this structure of SAW filter, for satisfying stopband requirements a dual-track structure was applied. Withdrawal weighting of interdigital transducers (IDT) was used to adjust the bandwidth of SAW filter.
会议录出版者	NORTHWEST INST NONFERROUS METAL RESEARCH ; SHAANXI ; C/O RARE METAL MATERIAL ENGINEERING PRESS, PO BOX 51, XIAN, SHAANXI 710016, PEOPLES R CHINA
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/18004]
专题	清华大学
推荐引用方式 GB/T 7714	Li, Dongmei,Wang, Xubo,Pan, Feng. Withdrawal weighting image-impedance connected SAW filters with Al-Mo alloy electrodes[C]. 见:RARE METAL MATERIALS AND ENGINEERING, 6th East Asian Conference on Chemical Sensors (EACCS-6), Guillin, PEOPLES R CHINA, Web of Science.

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