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	Electrophoretic deposition of Pb(Zr,Ti)O/sub 3/ powders on silicon wafer and sintering densification approach
	Ni Kang ; Jing-Feng Li
	2010-05-10 ; 2010-05-10
会议名称	Key Engineering Materials ; 3rd International Conference on High-Performance Ceramics (CICC-3) ; Shenzhen, China ; INSPEC
关键词	Experimental/ copper compounds densification electrophoretic coating techniques lead compounds piezoceramics piezoelectric thin films powders sintering sols surface charging/ electrophoretic deposition silicon wafer sintering densification method PZT powders piezoelectric ceramic films lead zirconate titanate powders platinum electrodes ethanol solution surface charges PZT particles green PZT films low-temperature eutectic sintering Cu/sub 2/O addition PbO addition PZT sol infiltration thick PZT films 700 degC PZT-Cu/sub 2/O-PbO Si-Pt PbZrO3TiO3-Cu2O-PbO/ A8115L Deposition from liquid phases (melts and solutions) A6855 Thin film growth, structure, and epitaxy A7755 Dielectric thin films A8270G Gels and sols A7340B Static electrification A8245 Electrochemistry and electrophoresis/ temperature 9.73E+02 K/ PbZrO3TiO3Cu2OPbO/ss TiO3/ss ZrO3/ss Cu2/ss Cu/ss O3/ss Pb/ss Ti/ss Zr/ss O/ss SiPt/sur Pt/sur Si/sur SiPt/ss Pt/ss Si/ss
中文摘要	Electrophoretic deposition (EPD) is a promising, simple and cost-effective method for fabrication of piezoelectric ceramic films. In this study, commercial lead zirconate titanate (PZT) powders were deposited onto silicon wafers coated with platinum electrodes by using EPD method in ethanol solution with a few amount of HCl to introduce surface charges to PZT particles. The sintering densification of the EPD-derived green PZT films were attempted with approaches: addition of a low-temperature eutectic sintering aid consists of Cu/sub 2/O and PbO, infiltration of PZT sol into the green film. Thick PZT films on Si wafers were obtained by sintering at 700 degrees C with sintering aid and sol-infiltration.
会议录出版者	Trans Tech Publications ; Switzerland
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/17984]
专题	清华大学
推荐引用方式 GB/T 7714	Ni Kang,Jing-Feng Li. Electrophoretic deposition of Pb(Zr,Ti)O/sub 3/ powders on silicon wafer and sintering densification approach[C]. 见:Key Engineering Materials, 3rd International Conference on High-Performance Ceramics (CICC-3), Shenzhen, China, INSPEC.

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