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	Design of a novel piezoelectric acoustic sensor using surface micromachining
	Yang, Y ; Ren, TL ; Liu, LT
	2010-05-07 ; 2010-05-07
会议名称	INTEGRATED FERROELECTRICS ; 17th International Symposium on Integrated Ferroelectrics ; Shanghai, PEOPLES R CHINA ; Web of Science
关键词	acoustic sensor surface micromachining porous silicon piezoelectric PZT thin film CONDENSER MICROPHONE Engineering, Electrical & Electronic Physics, Applied Physics, Condensed Matter
中文摘要	A novel structure of piezoelectric acoustic sensors using surface micromachining is proposed and designed. The advantage of surface micromachined acoustic sensors is to reduce the device size while maintaining their good performances compared with bulk micromachined counterparts. The simplified process sequence for the fabrication of acoustic sensors is given and porous silicon is used as a thick sacrificial layer. The PZT-based piezoelectric acoustic sensors exhibit a voltage sensitivity of 61 to 474 mu V/Pa, depending on geometry, which ranges from 200 to 500 mu m in length of the square membrane.
会议录出版者	TAYLOR & FRANCIS LTD ; ABINGDON ; 4 PARK SQUARE, MILTON PARK, ABINGDON OX14 4RN, OXON, ENGLAND
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/16852]
专题	清华大学
推荐引用方式 GB/T 7714	Yang, Y,Ren, TL,Liu, LT. Design of a novel piezoelectric acoustic sensor using surface micromachining[C]. 见:INTEGRATED FERROELECTRICS, 17th International Symposium on Integrated Ferroelectrics, Shanghai, PEOPLES R CHINA, Web of Science.

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