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	Fully integrated ferrite-based inductors for RF ICs
	Yang, C. ; Liu, F. ; Ren, T. ; Liu, L. ; Feng, H. ; Wang, A. Z. ; Long, H.
	2010-05-07 ; 2010-05-07
会议名称	SENSORS AND ACTUATORS A-PHYSICAL ; 13th International Conference on Solid-State Sensors, Actuators and Microsystems ; Seoul, SOUTH KOREA ; Web of Science
关键词	inductor ferrite fully integration RF ICs PLANAR MAGNETIC-STRUCTURES CHIP SPIRAL INDUCTORS MUTUAL IMPEDANCES POROUS SILICON SELF PERFORMANCE FABRICATION TECHNOLOGY SUBSTRATE Engineering, Electrical & Electronic Instruments & Instrumentation
中文摘要	Ferrite thin-film RF integrated inductors using IC compatible processes are proposed and also demonstrated by experiments. Ferrites (Co-based, MnZn-based, NiZn-based and YFe garnet) for RF integrated inductors are investigated, and CoZrO ferrite shows the suitable high-frequency performance for RF applications. Various inductors with different kinds of ferrite thin-films have been fabricated using fully integrated processes. A typical inductor sample with COZrO thin-film is presented. The L and Q values of the sample are 2.05 nH and 20.5 at 2 GHz, respectively. The inductance is raised by 17% and the quality factor is raised by 41%, compared with the inductor, which doesn't include ferrite thin-film. With the improvement of L and Q, the size of ferrite thin-film inductors can be reduced significantly. (c) 2005 Elsevier B.V. All rights reserved.
会议录出版者	ELSEVIER SCIENCE SA ; LAUSANNE ; PO BOX 564, 1001 LAUSANNE, SWITZERLAND
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/16850]
专题	清华大学
推荐引用方式 GB/T 7714	Yang, C.,Liu, F.,Ren, T.,et al. Fully integrated ferrite-based inductors for RF ICs[C]. 见:SENSORS AND ACTUATORS A-PHYSICAL, 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, SOUTH KOREA, Web of Science.

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