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	Ni-Zn ferrite-powder-mixed-photoresist coated on-chip RF inductor
	Yang Chen ; Liu Feng ; Ren Tian-ling ; Liu Li-tian ; Wang Albert ; Yue Zhen-xing
	2010-05-07 ; 2010-05-07
关键词	Experimental/ coating techniques copper compounds ferrites inductors iron compounds nanoparticles nickel compounds photoresists radiofrequency integrated circuits zinc compounds/ on-chip RF inductor ferrite films nanopowder-mixed-photo- resist coating technique inductor spirals low-temperature fabrication method film inductors Ni/sub 0.3/Zn/sub 0.6/Cu/sub 0.1/Fe/sub 2/O/sub 4// B2140 Inductors and transformers B1350H Microwave integrated circuits B0170G General fabrication techniques/ Ni0.3Zn0.6Cu0.1Fe2O4/int Fe2O4/int Cu0.1/int Ni0.3/int Zn0.6/int Fe2/int O4/int Cu/int Fe/int Ni/int Zn/int O/int Ni0.3Zn0.6Cu0.1Fe2O4/ss Fe2O4/ss Cu0.1/ss Ni0.3/ss Zn0.6/ss Fe2/ss O4/ss Cu/ss Fe/ss Ni/ss Zn/ss O/ss
中文摘要	On-chip RF inductors with integrated Ni-Zn ferrite films using a novel nano-powder-mixed-photo- resist coating technique is reported. Well synthesized nano-size Ni/sub 0.3/Zn/sub 0.6/Cu/sub 0.1/Fe/sub 2/O/sub 4/ powders are mixed into photoresist and then coated on top of RF inductor spirals for performance improvement. This new low- temperature fabrication method is developed to eliminate any damage introduced by conventional high temperature process (>600 degrees C) used in fabricating ferrite-integrated RF IC inductors. Measurement results show that, compared with air-cored inductor, the inductance(L) of ferrite film inductors increases by 14~ 27% across 0. 1-4 GHz range. This work demonstrates a promising way to fabricate ferrite-integrated high-performance on-chip RF inductors in IC technology.
语种	中文 ; 中文
出版者	Southeast University ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16685]
专题	清华大学
推荐引用方式 GB/T 7714	Yang Chen,Liu Feng,Ren Tian-ling,et al. Ni-Zn ferrite-powder-mixed-photoresist coated on-chip RF inductor[J],2010, 2010.
APA	Yang Chen,Liu Feng,Ren Tian-ling,Liu Li-tian,Wang Albert,&Yue Zhen-xing.(2010).Ni-Zn ferrite-powder-mixed-photoresist coated on-chip RF inductor..
MLA	Yang Chen,et al."Ni-Zn ferrite-powder-mixed-photoresist coated on-chip RF inductor".(2010).

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