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	Study on new structure uncooled a-Si microbolometer for infrared detection
	Liu, Xing-Ming ; Fang, Hua-Jun ; Liu, Li-Tian
	2010-05-07 ; 2010-05-07
关键词	uncooled IR detectors microbolometer a-Si polyimide film IMAGING ARRAY THIN-FILM SENSOR Engineering, Electrical & Electronic Nanoscience & Nanotechnology
中文摘要	A new structure uncooled amorphous silicon (a-Si) microbolometer for infrared (IR) detection has been fabricated and characterized. New type of thermal isolation and IR absorption structures based on polyimide (PI) and bottom metal reflective layer are presented. The fabrication process is described in this paper. The as-prepared microbolometer has the advantage of low cost, high yield and moderate performance. The dependence of resistance with different aspect ratio on operating temperature has been investigated and the temperature coefficient of resistance (TCR) is achieved. Based on the measured responsivity and noise characteristics, the influence of detectivity on chopping frequency is discussed. According to the measurements and calculations results, the maximal TCR is -2.8% and at a bias voltage of 5 V, the maximum detectivity of 1.7 x 10(8) cm Hz(1/2) W-1 is achieved at chopping frequency of 30 Hz. (C) 2007 Elsevier Ltd. All rights reserved.
语种	英语 ; 英语
出版者	ELSEVIER SCI LTD ; OXFORD ; THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, OXON, ENGLAND
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16683]
专题	清华大学
推荐引用方式 GB/T 7714	Liu, Xing-Ming,Fang, Hua-Jun,Liu, Li-Tian. Study on new structure uncooled a-Si microbolometer for infrared detection[J],2010, 2010.
APA	Liu, Xing-Ming,Fang, Hua-Jun,&Liu, Li-Tian.(2010).Study on new structure uncooled a-Si microbolometer for infrared detection..
MLA	Liu, Xing-Ming,et al."Study on new structure uncooled a-Si microbolometer for infrared detection".(2010).

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