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	Droplet actuating chip using the electrowetting-on-dielectric method
	Wu Jiangang ; Yue Ruifeng ; Zeng Xuefeng ; Liu Litian
	2010-05-07 ; 2010-05-07
关键词	Practical Theoretical or Mathematical/ computational fluid dynamics drops microactuators microelectrodes microfluidics numerical analysis phosphorus silicon surface tension wetting/ droplet actuating chip electrowetting-on-dielectric method microfluidic element sandwiched-configuration chip numerical analysis computational fluidics CFD-ACE software phosphorus-doped poly-silicon microelectrode array stability surface tension micro-electro-mechanical system 45 V/ B2575F Fabrication of micromechanical devices B8380M Microactuators B0290Z Other numerical methods C3260P Microactuators C7320 Physics and chemistry computing C4190 Other numerical methods/ voltage 4.5E+01 V
中文摘要	A droplet-based actuating chip was developed using the electrowetting-on-dielectric (EWOD) method to manipulate fluids in microfluidic elements. The actuation mechanism of the sandwiched-configuration EWOD chips was analyzed with numerical analysis of the droplets' movements using the computational fluidics software, CFD-ACE+. The chip fabrication, including a heavily phosphorus-doped poly-silicon microelectrode array and a thermally grown SiO/sub 2/ dielectric layer, is exploited to improve the chip stability and decrease the actuation voltage. A deionized droplet was successfully transported in air by applying a low voltage of 45 V.
语种	英语 ; 英语
出版者	Tsinghua Univ. Press ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16652]
专题	清华大学
推荐引用方式 GB/T 7714	Wu Jiangang,Yue Ruifeng,Zeng Xuefeng,et al. Droplet actuating chip using the electrowetting-on-dielectric method[J],2010, 2010.
APA	Wu Jiangang,Yue Ruifeng,Zeng Xuefeng,&Liu Litian.(2010).Droplet actuating chip using the electrowetting-on-dielectric method..
MLA	Wu Jiangang,et al."Droplet actuating chip using the electrowetting-on-dielectric method".(2010).

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