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	Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes
	Chao Wang ; Tianling Ren ; Zheyao Wang ; Yiping Zhu ; Ningxin Zhang ; Litian Liu
	2010-05-07 ; 2010-05-07
关键词	Experimental/ annealing capacitance dielectric polarisation ferroelectric thin films lead compounds piezoelectric thin films sol-gel processing/ polarized PZT films interdigital electrodes titania sol-gel method multicoating annealing thin film deposition processing capacitance-voltage curves ferroelectric films capacitance -40 to 40 V PZT Pt-Ti-PZT-TiO/sub 2/-SiO/sub 2/-Si PbZrO3TiO3 Pt-Ti-PbZrO3TiO3-TiO2-SiO2-Si/ A7755 Dielectric thin films A7760 Piezoelectricity and electrostriction A7780 Ferroelectricity and antiferroelectricity A7730 Dielectric polarization and depolarization effects A8115L Deposition from liquid phases (melts and solutions) A6855 Thin film growth, structure, and epitaxy A8140G Other heat and thermomechanical treatments/ PbZrO3TiO3/ss TiO3/ss ZrO3/ss O3/ss Pb/ss Ti/ss Zr/ss O/ss Pt-Ti-PbZrO3TiO3-TiO2-SiO2-Si/int PbZrO3TiO3/int SiO2/int TiO2/int TiO3/int ZrO3/int O3/int O2/int Pb/int Pt/int Si/int Ti/int Zr/int O/int PbZrO3TiO3/ss TiO3/ss ZrO3/ss O3/ss Pb/ss Ti/ss Zr/ss O/ss SiO2/bin TiO2/bin O2/bin Si/bin Ti/bin O/bin Pt/el Si/el Ti/el
中文摘要	In this paper, Pb(Zr/sub 0.53/,Ti/sub 0.47/)O/sub 3/ films are deposited on titania by sol-gel method, and PZT films of ~4 mu m in thickness are successfully obtained by repeating multicoating and annealing. Based on the thin film deposition processing, a laminated Pt/Ti/PZT/TiO/sub 2//SiO/sub 2//Si structure is proposed, and the PZT films are in-plane polarized by top interdigital electrodes (IDE). The capacitance-voltage curves of the PZT thick films are measured in a range of -40 V to 40 V, and the symmetric butterfly shapes of the curves indicate good ferroelectric properties of the films. The capacitance is found dependent on the parameters of the electrode configuration, and a simple equation for predicting the IDE capacitance is deduced.
语种	英语 ; 英语
出版者	Gordon & Breach ; Netherlands
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16650]
专题	清华大学
推荐引用方式 GB/T 7714	Chao Wang,Tianling Ren,Zheyao Wang,et al. Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes[J],2010, 2010.
APA	Chao Wang,Tianling Ren,Zheyao Wang,Yiping Zhu,Ningxin Zhang,&Litian Liu.(2010).Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes..
MLA	Chao Wang,et al."Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes".(2010).

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