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	Actuation and control of droplets by using electrowetting-on-dielectric
	Zeng Xue-Feng ; Yue Rui-Feng ; Wu Jian-Gang ; Dong Liang ; Liu Li-Tian
	2010-05-07 ; 2010-05-07
关键词	Experimental/ contact angle drops electric potential flow control microactuators microelectrodes microfluidics surface tension wetting/ electrowetting-on-dielectric liquid wettability solid surface electric potential microelectrode array dielectric layer droplet actuator droplet control fluorocarbon polymer hydrophobic layer contact angle deionized water silicone oil micro total analysis systems asymmetric deformation droplet-based laboratory on chip pressure gradient 35 V/ B2575D Design and modelling of micromechanical devices B8380M Microactuators C3260P Microactuators C3120T Level, flow and volume control/ voltage 3.5E+01 V
中文摘要	Electrowetting-on-dielectric (EWOD) controls directly the wettability of liquids on the solid surface by applying an electric potential to the microelectrode array under the dielectric layer. A prototype of the EWOD droplet actuator is put forward, consisting of Si used as the substrate of the microelectrode array, Si/sub 3/N/sub 4 / film as the dielectric layer and fluorocarbon polymer (p-C:F) film deposited by plasma enhanced chemical vapour deposition (PECVD) as the hydrophobic layer. The p-C:F film was uniform and compact, and the contact angle of deionized water on the p-C:F film reached 110 degrees. The actuator successfully actuated deionized droplets surrounded in silicone oil at the voltage of 35 V.
语种	英语 ; 英语
出版者	Chinese Phys. Soc ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16629]
专题	清华大学
推荐引用方式 GB/T 7714	Zeng Xue-Feng,Yue Rui-Feng,Wu Jian-Gang,et al. Actuation and control of droplets by using electrowetting-on-dielectric[J],2010, 2010.
APA	Zeng Xue-Feng,Yue Rui-Feng,Wu Jian-Gang,Dong Liang,&Liu Li-Tian.(2010).Actuation and control of droplets by using electrowetting-on-dielectric..
MLA	Zeng Xue-Feng,et al."Actuation and control of droplets by using electrowetting-on-dielectric".(2010).

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