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	Novel open-structure droplets actuating chip
	Wu Jian-gang ; Yue Rui-feng ; Zeng Xue-feng ; Liu Li-tian
	2010-05-07 ; 2010-05-07
关键词	New Development Practical/ drops microactuators microelectrodes microfluidics polymer films wetting/ open-structure droplets actuating chip electrowetting-on-dielectric heavy-doped poly-silicon microelectrode array SiO/sub 2/ film fluorocarbon polymer film hydrophobic dielectric layer silicon-aluminum line ground electrode voltage pulses microfluidics micrototal-analysis system 40 V SiO/sub 2// B8380M Microactuators B2575F Fabrication of micromechanical devices B2575D Design and modelling of micromechanical devices/ voltage 4.0E+01 V/ SiO2/int O2/int Si/int O/int SiO2/bin O2/bin Si/bin O/bin
中文摘要	A novel open-structure discrete droplets actuation based on electrowetting-on-dielectric is presented, consisting of heavy doped poly-silicon used as the microelectrode array, the complex layer of the SiO/sub 2/ film and the fluorocarbon polymer film as the hydrophobic dielectric layer, the suspended silicon-aluminum line as the ground electrode. By controlling the sequence of voltage pulses applied to the microelectrode array under the dielectric layer, droplets on the surface of the hydrophobic layer could be manipulated. Owing to the suspended-line structure, the transportation of droplet was successfully achieved in air by applying the voltage pulse of 40 V.
语种	中文 ; 中文
出版者	Editorial Dept. of the Chinese J. Electron Devices ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16627]
专题	清华大学
推荐引用方式 GB/T 7714	Wu Jian-gang,Yue Rui-feng,Zeng Xue-feng,et al. Novel open-structure droplets actuating chip[J],2010, 2010.
APA	Wu Jian-gang,Yue Rui-feng,Zeng Xue-feng,&Liu Li-tian.(2010).Novel open-structure droplets actuating chip..
MLA	Wu Jian-gang,et al."Novel open-structure droplets actuating chip".(2010).

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