QQ客服 官方微博 反馈留言

	Active damping of a piezoelectric MEMS acoustic sensor
	Xiaoming Wu ; Tianling Ren ; Litian Liu
	2010-05-07 ; 2010-05-07
关键词	Practical Experimental/ acoustic transducers closed loop systems damping lead compounds microactuators microsensors piezoelectric actuators piezoelectric thin films piezoelectric transducers/ active damping strategy piezoelectric MEMS acoustic sensor sensing function actuation function PZT film self-sensing control law simulation control circuit simulation closed loop damping control PZT PbZrO3TiO3/ A0670D Sensing and detecting devices A0710C Micromechanical devices and systems B2575F Fabrication of micromechanical devices B2860A Piezoelectric devices B7230 Sensing devices and transducers B7810C Sonic and ultrasonic transducers B8380M Microactuators B7230M Microsensors C3240D Electric transducers and sensing devices C3260B Electric actuators and final control equipment C3240P Microsensors C3260P Microactuators/ PbZrO3TiO3/ss TiO3/ss ZrO3/ss O3/ss Pb/ss Ti/ss Zr/ss O/ss
中文摘要	This paper presents the fabrication process and active damping strategy of piezoelectric MEMS acoustic sensor by combining two functions of sensing and actuation of the PZT film in one device. The electric characteristics of PZT film were determined by measurement. Simulation of self-sensing control law and control circuit are introduced. Important issues of the implementation of closed loop damping control are discussed. Experiment results show that the self-sensing damping of piezoelectric MEMS acoustic sensor is implemented successfully. This technology is more promising in improving the dynamic performance of piezoelectric MEMS devices because very low driven voltage and power consuming are sufficient.
语种	英语 ; 英语
出版者	Gordon & Breach ; Netherlands
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16532]
专题	清华大学
推荐引用方式 GB/T 7714	Xiaoming Wu,Tianling Ren,Litian Liu. Active damping of a piezoelectric MEMS acoustic sensor[J],2010, 2010.
APA	Xiaoming Wu,Tianling Ren,&Litian Liu.(2010).Active damping of a piezoelectric MEMS acoustic sensor..
MLA	Xiaoming Wu,et al."Active damping of a piezoelectric MEMS acoustic sensor".(2010).

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。