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	MSDL: a hierarchical micro-structure description language
	Yan Li-ren ; Chen Xiao-cheng ; Dou Wei-zhi
	2010-05-07 ; 2010-05-07
关键词	Practical/ CMOS integrated circuits electronic design automation hardware description languages micromechanical devices semiconductor technology/ MSDL microstructure description language CMOS structure IC MEMS device computer controlled manufacturing system structure analysis semiconductor process/ B1130B Computer-aided circuit analysis and design B1265A Digital circuit design, modelling and testing C5210B Computer-aided logic design C7410D Electronic engineering computing
中文摘要	MSDL, a micro-structure description language, which describes a device in 5 levels, is illustrated with an example of a sub-micron CMOS structure. Arbitrary micro-structures, including IC's, MEMS devices, etc, can be described with MSDL. Once a device is MSDL described, analyzing of the structure characteristics, checking of the structure for manufacturing, sequencing of process steps, and implementing of the fabrication process, can all be executed by a computer, or a computer controlled manufacturing system. So, MSDL can be regarded as an efficient tool to assist the development of new devices.
语种	中文 ; 中文
出版者	Editorial Dept. Microelectronics ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16528]
专题	清华大学
推荐引用方式 GB/T 7714	Yan Li-ren,Chen Xiao-cheng,Dou Wei-zhi. MSDL: a hierarchical micro-structure description language[J],2010, 2010.
APA	Yan Li-ren,Chen Xiao-cheng,&Dou Wei-zhi.(2010).MSDL: a hierarchical micro-structure description language..
MLA	Yan Li-ren,et al."MSDL: a hierarchical micro-structure description language".(2010).

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