MSDL: a hierarchical micro-structure description language | |
Yan Li-ren ; Chen Xiao-cheng ; Dou Wei-zhi | |
2010-05-07 ; 2010-05-07 | |
关键词 | Practical/ CMOS integrated circuits electronic design automation hardware description languages micromechanical devices semiconductor technology/ MSDL microstructure description language CMOS structure IC MEMS device computer controlled manufacturing system structure analysis semiconductor process/ B1130B Computer-aided circuit analysis and design B1265A Digital circuit design, modelling and testing C5210B Computer-aided logic design C7410D Electronic engineering computing |
中文摘要 | MSDL, a micro-structure description language, which describes a device in 5 levels, is illustrated with an example of a sub-micron CMOS structure. Arbitrary micro-structures, including IC's, MEMS devices, etc, can be described with MSDL. Once a device is MSDL described, analyzing of the structure characteristics, checking of the structure for manufacturing, sequencing of process steps, and implementing of the fabrication process, can all be executed by a computer, or a computer controlled manufacturing system. So, MSDL can be regarded as an efficient tool to assist the development of new devices. |
语种 | 中文 ; 中文 |
出版者 | Editorial Dept. Microelectronics ; China |
内容类型 | 期刊论文 |
源URL | [http://hdl.handle.net/123456789/16528] ![]() |
专题 | 清华大学 |
推荐引用方式 GB/T 7714 | Yan Li-ren,Chen Xiao-cheng,Dou Wei-zhi. MSDL: a hierarchical micro-structure description language[J],2010, 2010. |
APA | Yan Li-ren,Chen Xiao-cheng,&Dou Wei-zhi.(2010).MSDL: a hierarchical micro-structure description language.. |
MLA | Yan Li-ren,et al."MSDL: a hierarchical micro-structure description language".(2010). |
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