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	Design and optimization of laminated piezoresistive microcantilever sensors
	Wang, ZY ; Yue, RF ; Zhang, RX ; Liu, LT
	2010-05-07 ; 2010-05-07
关键词	piezoresistive microcantilever sensor ATOMIC-FORCE MICROSCOPY NANOMECHANICAL CANTILEVER ARRAY SCANNING PROBE MICROSCOPY READ-OUT COATED MICROCANTILEVER BIOSENSOR DNA TECHNOLOGY VAPOR NOISE Engineering, Electrical & Electronic Instruments & Instrumentation
中文摘要	Microcantilevers-based sensors (MCSs) are a new approach to detecting and measuring physical, chemical, and biological signals in the nano- to femto-range level. Piezoresistive readout systems for MCSs have the advantages of full integration, low cost, ease of use, and the capability of manipulating large arrays. This paper presents a design method for laminated piezoresistive MCSs to obtain optimal performance by optimizing the dimensions of the microcantilevers and the doping concentration of the piezoresistors. Laminated theory was employed to deduce the closed-form solutions to static stress and natural frequency. Expressions for predicting sensitivity and resolution were derived by combining stress distribution with power densities of I If noise and Johnson noise. Finite element method (FEM) was performed to verify the theoretical results. The thickness of the laminated MCSs and the doping concentration were optimized by using static analyses and power densities of noise to generate the best sensitivity and resolution. A method based on non-linear programming is given to facilitate the solving process. These methods and some conclusions are also applicable to developing other types of piezoresistive sensors that use laminated structures. (c) 2004 Elsevier B.V All rights reserved.
语种	英语 ; 英语
出版者	ELSEVIER SCIENCE SA ; LAUSANNE ; PO BOX 564, 1001 LAUSANNE, SWITZERLAND
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16432]
专题	清华大学
推荐引用方式 GB/T 7714	Wang, ZY,Yue, RF,Zhang, RX,et al. Design and optimization of laminated piezoresistive microcantilever sensors[J],2010, 2010.
APA	Wang, ZY,Yue, RF,Zhang, RX,&Liu, LT.(2010).Design and optimization of laminated piezoresistive microcantilever sensors..
MLA	Wang, ZY,et al."Design and optimization of laminated piezoresistive microcantilever sensors".(2010).

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