QQ客服 官方微博 反馈留言

	Analysis and design of an accelerometer fabricated with porous silicon as sacrificial layer
	Zhou Jun ; Wang Xiaohong ; Yao Pengjun ; Dong Liang ; Liu Litian
	2010-05-07 ; 2010-05-07
关键词	Practical Experimental/ accelerometers crystal microstructure elemental semiconductors microsensors piezoresistive devices porous semiconductors semiconductor epitaxial layers silicon sputter etching/ piezoresistive silicon accelerometer fabrication porous silicon etching epitaxial layer MEMS movable microstructures TMAH solution additional Si powder Si/ A0630G Velocity, acceleration and rotation measurement A0710C Micromechanical devices and systems B7320E Velocity, acceleration and rotation measurement B2550E Surface treatment (semiconductor technology) B2575F Fabrication of micromechanical devices B0580 Powders and porous materials (engineering materials science) B7230M Microsensors/ Si/int Si/el
中文摘要	A piezoresistive silicon accelerometer fabricated by a selective, self-stopping porous silicon (PS) etching method using an epitaxial layer for movable microstructures is described and analyzed. The technique is capable of constructing a microstructure precisely. PS is used as a sacrificial layer, and releasing holes are etched in the film. TMAH solution with additional Si powder and (NH/sub 4/)/sub 2/S/sub 2/O/sub 8/ is used to remove PS through the small releasing holes without eroding uncovered Al. The designed fabrication process is full compatible with standard CMOS process.
语种	英语 ; 英语
出版者	Science Press ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16392]
专题	清华大学
推荐引用方式 GB/T 7714	Zhou Jun,Wang Xiaohong,Yao Pengjun,et al. Analysis and design of an accelerometer fabricated with porous silicon as sacrificial layer[J],2010, 2010.
APA	Zhou Jun,Wang Xiaohong,Yao Pengjun,Dong Liang,&Liu Litian.(2010).Analysis and design of an accelerometer fabricated with porous silicon as sacrificial layer..
MLA	Zhou Jun,et al."Analysis and design of an accelerometer fabricated with porous silicon as sacrificial layer".(2010).

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。