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	A method for describing and monitoring process states in IC fabrication
	Ju Li-jie ; Yan Li-ren
	2010-05-07 ; 2010-05-07
关键词	Practical/ integrated circuit manufacture process monitoring/ process state monitoring integrated circuit fabrication process state space PCM parameters process failures data distribution statistical process control/ B0170G General fabrication techniques B0170E Production facilities and engineering
中文摘要	One way to construct a process state space is to compose a set of generalized parameters from orthogonalizing the PCM parameters, and use them as the bases of the space. With our method, not only the possible process failures can be detected, but also the process state can be long term monitored. In the process state space, the data distribution appears like a multi-dimension elliptical globe. So, the transition of a process can be monitored by tracing the transmutations of the elliptical globe. A formula is suggested to calculate the process state similarity. Further, if a process failure occurs, the cause can be directly pointed out.
语种	中文 ; 中文
出版者	Editorial Dept. Microelectronics ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16371]
专题	清华大学
推荐引用方式 GB/T 7714	Ju Li-jie,Yan Li-ren. A method for describing and monitoring process states in IC fabrication[J],2010, 2010.
APA	Ju Li-jie,&Yan Li-ren.(2010).A method for describing and monitoring process states in IC fabrication..
MLA	Ju Li-jie,et al."A method for describing and monitoring process states in IC fabrication".(2010).

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