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	High-speed Al/sub 2/O/sub 3/ submount for 40 Gb/s electroabsorption modulators
	Tian Jian-Bai ; Xiong Bing ; Wang Jian ; Cai Peng-Fei ; Sun Chang-Zheng ; Luo Yi
	2010-05-06 ; 2010-05-06
关键词	Practical Experimental/ coplanar waveguides electro-optical modulation electroabsorption high-speed optical techniques impedance matching microwave photonics optical communication equipment optical fabrication optical fibre communication thin film resistors/ high-speed electroabsorption modulator optical fabrication chip-level packaging chip-level testing Al/sub 2/O/sub 3/-based submount coplanar waveguide microwave signal feeding Ta/sub 2/N thin-film resistor impedance matching CPW electrode material reflection coefficient 40 Gbit/s Al/sub 2/O/sub 3/ Ta/sub 2/N Ti- Cu-Ni-Au/ A4280K Optical beam modulators A4280S Optical communication devices A4280W Ultrafast optical techniques A4285D Optical fabrication, surface grinding B4150 Electro-optical devices B6260C Optical communication equipment B1350P Microwave photonics/ bit rate 4.0E+10 bit/s/ Al2O3/bin Al2/bin Al/bin O3/bin O/bin Ta2N/sur Ta2/sur Ta/sur N/sur Ta2N/bin Ta2/bin Ta/bin N/bin TiCuNiAu/ss Au/ss Cu/ss Ni/ss Ti/ss
中文摘要	A high-speed submount was designed and fabricated for 40 Gb/s electroabsorption modulators (EAMs), and characterized in the chip-level packaging and testing of an EAM device. The Al/sub 2/O/sub 3/-based submount contains a coplanar waveguide (CPW) for microwave signal feeding and a Ta/sub 2/N thin-film resistor for impedance matching of EA modulator. Ti/ Cu/Ni/Au metal is introduced as the CPW electrode material, and good contact with Ta/sub 2 /N thin-film is guaranteed accordingly. Therefore, the typical reflection coefficient of the submount is reduced to be lower than -21 dB up to 40 GHz. As a demonstration, a high-speed EA modulator was packaged by using the high-speed submount, and the small-signal modulation bandwidth was measured to be over 40 GHz.
语种	中文 ; 中文
出版者	Science Press ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/12077]
专题	清华大学
推荐引用方式 GB/T 7714	Tian Jian-Bai,Xiong Bing,Wang Jian,et al. High-speed Al/sub 2/O/sub 3/ submount for 40 Gb/s electroabsorption modulators[J],2010, 2010.
APA	Tian Jian-Bai,Xiong Bing,Wang Jian,Cai Peng-Fei,Sun Chang-Zheng,&Luo Yi.(2010).High-speed Al/sub 2/O/sub 3/ submount for 40 Gb/s electroabsorption modulators..
MLA	Tian Jian-Bai,et al."High-speed Al/sub 2/O/sub 3/ submount for 40 Gb/s electroabsorption modulators".(2010).

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