High-speed Al2O3-based submount for 40Gb/s electroabsorption modulators | |
Tian, JB ; Xiong, B ; Wang, J ; Cai, PF ; Sun, CZ ; Luo, Y | |
2010-05-06 ; 2010-05-06 | |
关键词 | high-speed submount electroabsorption modulator (EAM) coplanar waveguide (CPW) thin-film resistor impedance matching Optics |
中文摘要 | A high-speed submount was designed and fabricated for 40 Gb/s electroabsorption modulators ( EAMs), and characterized in the chip-level packaging and testing of an EAM device. The Al2O3-based submount contains a coplanar waveguide (CPW) for microwave signal feeding and a Ta2N thin-film resistor for impedance matching of EA modulator. Ti/ Cu/Ni/Au metal is introduced as-the CPW electrode material, and good contact with Ta2N thin-film is guaranteed accordingly. Therefore, the typical reflection coefficient of the submount is reduced to be lower than -21 dB up to 40 GHz. As a demonstration, a high-speed EA modulator was packaged by using the high-speed submount, and the small-signal modulation bandwidth was measured to be over 40 GHz. |
语种 | 中文 ; 中文 |
出版者 | SCIENCE PRESS ; BEIJING ; 16 DONGHUANGCHENGGEN NORTH ST, BEIJING 100717, PEOPLES R CHINA |
内容类型 | 期刊论文 |
源URL | [http://hdl.handle.net/123456789/11094] ![]() |
专题 | 清华大学 |
推荐引用方式 GB/T 7714 | Tian, JB,Xiong, B,Wang, J,et al. High-speed Al2O3-based submount for 40Gb/s electroabsorption modulators[J],2010, 2010. |
APA | Tian, JB,Xiong, B,Wang, J,Cai, PF,Sun, CZ,&Luo, Y.(2010).High-speed Al2O3-based submount for 40Gb/s electroabsorption modulators.. |
MLA | Tian, JB,et al."High-speed Al2O3-based submount for 40Gb/s electroabsorption modulators".(2010). |
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