CORC  > 清华大学
High-speed Al2O3-based submount for 40Gb/s electroabsorption modulators
Tian, JB ; Xiong, B ; Wang, J ; Cai, PF ; Sun, CZ ; Luo, Y
2010-05-06 ; 2010-05-06
关键词high-speed submount electroabsorption modulator (EAM) coplanar waveguide (CPW) thin-film resistor impedance matching Optics
中文摘要A high-speed submount was designed and fabricated for 40 Gb/s electroabsorption modulators ( EAMs), and characterized in the chip-level packaging and testing of an EAM device. The Al2O3-based submount contains a coplanar waveguide (CPW) for microwave signal feeding and a Ta2N thin-film resistor for impedance matching of EA modulator. Ti/ Cu/Ni/Au metal is introduced as-the CPW electrode material, and good contact with Ta2N thin-film is guaranteed accordingly. Therefore, the typical reflection coefficient of the submount is reduced to be lower than -21 dB up to 40 GHz. As a demonstration, a high-speed EA modulator was packaged by using the high-speed submount, and the small-signal modulation bandwidth was measured to be over 40 GHz.
语种中文 ; 中文
出版者SCIENCE PRESS ; BEIJING ; 16 DONGHUANGCHENGGEN NORTH ST, BEIJING 100717, PEOPLES R CHINA
内容类型期刊论文
源URL[http://hdl.handle.net/123456789/11094]  
专题清华大学
推荐引用方式
GB/T 7714
Tian, JB,Xiong, B,Wang, J,et al. High-speed Al2O3-based submount for 40Gb/s electroabsorption modulators[J],2010, 2010.
APA Tian, JB,Xiong, B,Wang, J,Cai, PF,Sun, CZ,&Luo, Y.(2010).High-speed Al2O3-based submount for 40Gb/s electroabsorption modulators..
MLA Tian, JB,et al."High-speed Al2O3-based submount for 40Gb/s electroabsorption modulators".(2010).
个性服务
查看访问统计
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。


©版权所有 ©2017 CSpace - Powered by CSpace