A method for achieving monotonic frequency-temperature response for langasite surface-acoustic-wave high-temperature sensor

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	A method for achieving monotonic frequency-temperature response for langasite surface-acoustic-wave high-temperature sensor
	Bao Shaoming 1; Ke Yabing 2; Zheng Yanqing 3; Cheng Lina 2; Li Honglang 2
刊名	JAPANESE JOURNAL OF APPLIED PHYSICS
	2016-02-01
卷号	55 期号:2
英文摘要	To achieve the monotonic frequency-temperature response for a high-temperature langasite (LGS) surface-acoustic-wave (SAW) sensor in a wide temperature range, a method utilizing two substrate cuts with different propagation angles on the same substrate plane was proposed. In this method, the theory of effective permittivity is adopted to calculate the temperature coefficients of frequency (TCF), electromechanical coupling coefficients (k(2)), and power flow angle (PFA) for different propagation angles on the same substrate plane, and then the two substrate cuts were chosen to have large k(2) and small PFA, as well as the difference in their TCFs (Delta TCF) to always have the same sign of their values. The Z-cut LGS substrate plane was taken as an example, and the two suitable substrate cuts with propagation angles of 74 and 80 degrees were chosen to derive a monotonic frequency-temperature response for LGS SAW sensors at -50 to 540 degrees C. Experiments on a LGS SAW sensor using the above two substrate cuts were designed, and its measured frequency-temperature response at -50 to 540 degrees C agreed well with the theory, demonstrating the high accuracy of the proposed method. (C) 2016 The Japan Society of Applied Physics
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Physics, Applied
研究领域[WOS]	Physics
关键词[WOS]	INTERDIGITAL TRANSDUCERS ; MATERIAL CONSTANTS ; SAW ; COEFFICIENTS ; DEVICES ; DERIVE ; LGS
收录类别	SCI
语种	英语
WOS记录号	WOS:000369005300039
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/23235]
专题	上海硅酸盐研究所_人工晶体研究中心_期刊论文
作者单位	1.Sichuan Univ, Coll Mat Sci & Engn, Chengdu 610064, Peoples R China 2.Chinese Acad Sci, Inst Acoust, Acoust Microelectromech Syst Lab, Beijing 100190, Peoples R China 3.Chinese Acad Sci, Shanghai Inst Ceram, Shanghai 200050, Peoples R China
推荐引用方式 GB/T 7714	Bao Shaoming,Ke Yabing,Zheng Yanqing,et al. A method for achieving monotonic frequency-temperature response for langasite surface-acoustic-wave high-temperature sensor[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2016,55(2).
APA	Bao Shaoming,Ke Yabing,Zheng Yanqing,Cheng Lina,&Li Honglang.(2016).A method for achieving monotonic frequency-temperature response for langasite surface-acoustic-wave high-temperature sensor.JAPANESE JOURNAL OF APPLIED PHYSICS,55(2).
MLA	Bao Shaoming,et al."A method for achieving monotonic frequency-temperature response for langasite surface-acoustic-wave high-temperature sensor".JAPANESE JOURNAL OF APPLIED PHYSICS 55.2(2016).