Fabrication of CNT-based MEMS piezoresistive pressure sensors using DEP nanoassembly

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	Fabrication of CNT-based MEMS piezoresistive pressure sensors using DEP nanoassembly
	Fung, Carmen K. M.; Zhang, Maggie Q. H.; Dong ZL(董再励); Li WJ(李文荣)
	2005
会议名称	2005 5th IEEE Conference on Nanotechnology
会议日期	July 11, 2005 - July 15, 2005
会议地点	Nagoya, Japan
页码	369-372
通讯作者	李文荣
中文摘要	This paper reports the fabrication technique of a novel carbon nanotubes (CNTs) based MEMS pressure sensor with piezoresistive gauge factor potentially much greater than polysilicon based sensors. By using the dielectrophoretic (DEP) nanoassembly of CNTs and a MEMS-compatible process, we have successfully integrated bundled strands of CNT sensing elements on arrays of Polymethylmethacrylate (PMMA) diaphragms. The piezoresistive effects of CNT were preliminarily investigated by measuring the pressure-resistance dependency of the sensors and preliminary results indicated that the CNT-based micro sensors were capable of sensing input pressure variations. Moreover, the mechanical properties of the diaphragms were studied experimentally and theoretically, which showed the deflection and strain distribution of the diaphragms with different input pressures, in order to conclusively determine the piezoresistivity of bundled CNTs. Based on these experimental evidences, we propose that carbon nanotubes is a novel material for fabricating micro pressure sensors on polymer substrates - which may serve as alternative sensors for silicon based pressure sensors when bio-compatibility and low-cost applications are required.
收录类别	EI
产权排序	2
会议录	2005 5th IEEE Conference on Nanotechnology
会议录出版者	IEEE Computer Society
会议录出版地	Piscataway, NJ, USA
语种	英语
ISBN号	978-0-7803-9199-4
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/20016]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Fung, Carmen K. M.,Zhang, Maggie Q. H.,Dong ZL,et al. Fabrication of CNT-based MEMS piezoresistive pressure sensors using DEP nanoassembly[C]. 见:2005 5th IEEE Conference on Nanotechnology. Nagoya, Japan. July 11, 2005 - July 15, 2005.