Microplasmas for direct, substrate-independent deposition of nanostructured metal oxides

CORC > 苏州纳米技术与纳米仿生研究所 > 中国科学院苏州纳米技术与纳米仿生研究所 > 测试分析平台

	Microplasmas for direct, substrate-independent deposition of nanostructured metal oxides
	Mackie, KE; Pebley, AC; Butala, MM; Zhang, JP(张锦平); Stucky, GD; Gordon, MJ
刊名	APPLIED PHYSICS LETTERS
	2016
卷号	109 期号:3
通讯作者	Gordon, MJ
英文摘要	A general, substrate-independent method for plasma deposition of nanostructured, crystalline metal oxides is presented. The technique uses a flow-through, micro-hollow cathode plasma discharge (supersonic microplasma jet) with a "remote" ring anode to deliver a highly directed flux of growth species to the substrate. A diverse range of nanostructured materials (e.g., CuO, alpha-Fe2O3, and NiO) can be deposited on any room temperature surface, e.g., conductors, insulators, plastics, fibers, and patterned surfaces, in a conformal fashion. The effects of deposition conditions, substrate type, and patterning on film morphology, nanostructure, and surface coverage are highlighted. The synthesis approach presented herein provides a general and tunable method to deposit a variety of functional and hierarchical metal oxide materials on many different surfaces. High surface area, conversion-type CuO electrodes for Li-ion batteries are demonstrated as a proof-of-concept example. Published by AIP Publishing.
关键词[WOS]	LITHIUM-ION BATTERIES ; PLASMA ; PERFORMANCE ; NANOWIRES ; FACILE ; ANODES ; GROWTH ; CARBON ; VAPOR ; FILMS
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000381385900061
内容类型	期刊论文
源URL	[http://ir.sinano.ac.cn/handle/332007/4747]
专题	苏州纳米技术与纳米仿生研究所_测试分析平台
推荐引用方式 GB/T 7714	Mackie, KE,Pebley, AC,Butala, MM,et al. Microplasmas for direct, substrate-independent deposition of nanostructured metal oxides[J]. APPLIED PHYSICS LETTERS,2016,109(3).
APA	Mackie, KE,Pebley, AC,Butala, MM,Zhang, JP,Stucky, GD,&Gordon, MJ.(2016).Microplasmas for direct, substrate-independent deposition of nanostructured metal oxides.APPLIED PHYSICS LETTERS,109(3).
MLA	Mackie, KE,et al."Microplasmas for direct, substrate-independent deposition of nanostructured metal oxides".APPLIED PHYSICS LETTERS 109.3(2016).