Nano/microchannel fabrication based on SU-8 using sacrificial resist etching method

	Nano/microchannel fabrication based on SU-8 using sacrificial resist etching method
	Jin, Jian; Wang, Xudi; Li, Xin; Li, Xiaojun; Di, Si
刊名	MICRO & NANO LETTERS
	2012
英文摘要	Polymer-based nano/microfluidic devices are becoming increasingly important for biological applications and fluidic control. Reported is a new etching methodfor the fabrication of nano/ microfluidic channels based on SU-8 using AZ1350 as a sacrificial resist. In contrast to all the previous fabrication routes, thisetching method is suitable for fabricating the channel with dimensions ranging from micrometres to nanometres. By this route, the most critical step is to prevent the two mixed photoresists and this problem is solved by sputtering a thin layer of SiO2. Furthermore, this is a size-controlled nanochannel fabricationmethod because the size of the channel is only dependent on the sacrificial layer structure whose size could be controlled by the oxygen plasma process. In addition, the developing etching speed is measured and some methods to accelerate the developing etching rate are proposed. This novel process is simple and inexpensive for mass nano/microchannel manufacturing, which could have wide applications in biomedical and fluidic transport systems.
收录类别	SCI
原文出处	http://digital-library.theiet.org/content/journals/10.1049/mnl.2012.0775
语种	英语
内容类型	期刊论文
源URL	[http://ir.siat.ac.cn:8080/handle/172644/4337]
专题	深圳先进技术研究院_南沙所
作者单位	MICRO & NANO LETTERS
推荐引用方式 GB/T 7714	Jin, Jian,Wang, Xudi,Li, Xin,et al. Nano/microchannel fabrication based on SU-8 using sacrificial resist etching method[J]. MICRO & NANO LETTERS,2012.
APA	Jin, Jian,Wang, Xudi,Li, Xin,Li, Xiaojun,&Di, Si.(2012).Nano/microchannel fabrication based on SU-8 using sacrificial resist etching method.MICRO & NANO LETTERS.
MLA	Jin, Jian,et al."Nano/microchannel fabrication based on SU-8 using sacrificial resist etching method".MICRO & NANO LETTERS (2012).